# US 11,307,156 B2 · Device for measuring secondary electron emission coefficient > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,307,156 B2 - Document ID: US11307156B2 - Status: Granted - Kind: B2 - Application number: 16/908,987 - Filed: 2020-06-23 - Published: 2021-09-23 - Granted: 2022-04-19 - Earliest claimed: 2020-03-19 - Assignees: Tsinghua University; Hon Hai Precision Industry Co., Ltd. - Applicants: Tsinghua University; Hon Hai Precision Industry Co., Ltd. - Inventors: Ke Zhang; Kai-Li Jiang; Shou-Shan Fan - Web page: https://patentgrep.com/patent/US11307156B2 ## CPC - G01N 23/2251: using incident electron beams, e.g. scanning electron microscopy [SEM] - G01N 2223/07: secondary emission - G01N 2223/507: secondary-emission detector - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A device for measuring a secondary electron emission coefficient comprises a scanning electron microscope, a first collecting plate, a second collecting plate, a first galvanometer, a second galvanometer, a voltmeter, and a Faraday cup. The scanning electron microscope comprises an electron emitter and a chamber. A sample is located between the first collecting plate and the second collecting plate. The first galvanometer is used to test a current intensity of electrons escaping from the sample and hitting the first collecting plate and the second collecting plate. A high-energy electron beam emitted by the electron emitter passes through the first collecting plate and the second collecting plate, and enters the Faraday cup. The second galvanometer is used to test a current intensity of electrons entering the Faraday cup. ## Claims ### Claim 1 A device for measuring a secondary electron emission coefficient, the device comprising: a scanning electron microscope comprising an electron emitter and a chamber, wherein the electron emitter is configured to emit a high-energy electron beam; a first collecting plate located in the chamber and comprising a first through hole; a second collecting plate located in the chamber and comprising a second through hole, wherein the first collecting plate and the second collecting plate are parallel with and spaced apart from each other, and a tested sample is located between the first collecting plate and the second collecting plate; a first galvanometer comprising a first terminal and a second terminal and configured to test a current intensity of electrons, wherein the first terminal is connected to the first collecting plate, and the second terminal is connected to the tested sample; and the electrons escape from a surface of the tested sample and hit the first collecting plate and the second collecting plate, after the high-energy electron beam hits the tested sample; a Faraday cup located in the chamber and comprising an electron inlet, wherein the first through hole, the second through hole, and the electron inlet penetrate through with each other, the high-energy electron beam passes through the first through hole, the second through hole, and the electron inlet, and then enters the Faraday cup; a second galvanometer configured to test a current intensity of electrons entering the Faraday cup, wherein a first end of the second galvanometer is connected to the Faraday cup, and a second end of the second galvanometer is grounded; and a voltmeter comprising a third terminal and a fourth terminal and configured to test a voltage difference between the first collecting plate and the tested sample, wherein the third terminal is connected to the first collecting plate, and the fourth terminal is connected to the tested sample. ### Claim 2 (depends on 1) The device of claim 1, wherein the tested sample is a nano-sized two-dimensional material. ### Claim 3 (depends on 2) The device of claim 2, wherein an area of the tested sample is greater than or equal to 10 square nanometers and less than 50 square nanometers. ### Claim 4 (depends on 1) The device of claim 1, wherein the tested sample is a two-dimensional metal molybdenum. ### Claim 5 (depends on 1) The device of claim 1, wherein a diameter of a focused beam pot of the high-energy electron beam is ranged from 1.0 nanometer to 10 nanometers. ### Claim 6 (depends on 1) The device of claim 1, wherein a material of the first collecting plate is metal, conductive polymer, antimony tin oxide, graphite or and indium tin oxide. ### Claim 7 (depends on 1) The device of claim 1, wherein the first collecting plate is a copper plate. ### Claim 8 (depends on 1) The device of claim 1, wherein a material of the second collecting plate is metal, conductive polymer, antimony tin oxide, graphite or indium tin oxide. ### Claim 9 (depends on 1) The device of claim 1, wherein the second collecting plate is a copper plate. ### Claim 10 (depends on 1) The device of claim 1, wherein a separation distance between the second collecting plate and the first collecting plate is greater than or equal to 80 micrometers and less than or equal to 120 micrometers. ### Claim 11 (depends on 10) The device of claim 10, wherein the separation distance between the second collecting plate and the first collecting plate is 100 micrometers. ### Claim 12 (depends on 1) The device of claim 1, wherein the first galvanometer, the second galvanometer, and the voltmeter are integrated into a source meter. ### Claim 13 (depends on 1) The device of claim 1, further comprising a voltage supply unit configured to apply a voltage between the tested sample and the first collecting plate. ### Claim 14 (depends on 13) The device of claim 13, wherein the voltage supply unit is an external power supply. ### Claim 15 (depends on 1) The device of claim 1, further comprising a fixing element configured to fix the tested sample between the first collecting plate and the second collecting plate. ### Claim 16 (depends on 1) The device of claim 1, wherein the surface of the tested sample is free of carbon.