# US 11,307,109 B2 · Differential pressure gauge with improved signal-to-noise ratio suppression

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- Number: US 11,307,109 B2
- Document ID: US11307109B2
- Status: Granted
- Kind: B2
- Application number: 17/112,073
- Filed: 2020-12-04
- Published: 2021-06-17
- Granted: 2022-04-19
- Earliest claimed: 2019-12-12
- Assignees: Azbil Corporation
- Applicants: Azbil Corporation
- Inventors: Hirofumi Tojo; Tomohisa Tokuda; Nozomi Kida
- Web page: https://patentgrep.com/patent/US11307109B2

## CPC

- G01L 13/025: {using diaphragms}
- G01L 19/0038: {being part of the housing (other details about the housing G01L19/14)}
- G01L 19/02: Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means (for aneroid barometers G01L7/14)
- G01L 9/008: {using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025)}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

A differential pressure gauge of the invention contains: a diaphragm layer disposed between first and second parts; and a wall between a first region on a pressure-receiving portion side and a second region on a first through-hole side within a second pressure chamber. The diaphragm layer covers the pressure-receiving portion over a first pressure chamber and has the first through-hole with one end disposed in the second pressure chamber away from the pressure-receiving portion. The wall is disposed with gaps formed from inner walls of the second pressure chamber. The first pressure chamber is formed through the first part, the second pressure chamber has an opening facing the diaphragm layer, the first part has a second through-hole continuing to the first through-hole, and a base has a third through-hole with one end disposed in the first pressure chamber and a fourth through-hole continuing to the second through-hole.

## Claims

### Claim 1

A differential pressure gauge comprising:
a base;
a first part disposed on an upper surface of the base and defining a first pressure chamber;
a second part disposed on the first part, comprising a region in which the first pressure chamber is defined in plan view and defining a second pressure chamber, the second pressure chamber being larger than the first pressure chamber;
a diaphragm layer disposed between the first part and the second part, comprising a pressure-receiving portion in the region of the first pressure chamber in plan view, the diaphragm layer being formed with a first through-hole, the first through-hole having an opening at one end disposed in the second pressure chamber in a region other than the pressure-receiving portion; and
a wall disposed between a first region of the second pressure chamber on a side comprising the pressure-receiving portion and a second region on a side comprising the first through-hole, the wall being disposed with gaps formed from inner walls of the second pressure chamber,
wherein
the first pressure chamber is formed through the first part,
the second pressure chamber has an opening on a diaphragm layer side,
the first part is formed with a second through hole continuing to the first through-hole, and
the base is formed with a third through-hole having an opening at one end disposed in the first pressure chamber, and a fourth through-hole continuing to the second through-hole.

### Claim 2 (depends on 1)

The differential pressure gauge according to claim 1, wherein
the wall is formed to be connected to the diaphragm layer and a ceiling of the second pressure chamber facing the diaphragm layer.

### Claim 3 (depends on 1)

The differential pressure gauge according to claim 1, wherein
the wall defines a gap between the diaphragm layer and the ceiling of the second pressure chamber facing the diaphragm layer.

### Claim 4 (depends on 3)

The differential pressure gauge according to claim 3, wherein
the wall is formed to be connected to each of two side surfaces of the second pressure chamber facing each other across the wall.

### Claim 5 (depends on 1)

The differential pressure gauge according to claim 1, further comprising
a strain gauge provided in the pressure-receiving portion of the diaphragm layer.