Measurement system and method thereof

A method for a measurement system, including a control device comprising a processor;

• an inspection device, having a stage on which a measurement object is placed, the stage is configured to move in a first direction and a second direction;
• a motor that drives the stage to move in the first direction and the second direction;
• an encoder mounted to the motor;
• a measurement device having a buffer;
• and a drive device configured to drive the motor to change a relative position between the measurement device and the measurement object, the drive device is controlled by the control device, the method comprising:
• measuring the measurement object in every first period to obtain measurement values, wherein the measurement values are temporarily stored in the buffer;
• transmitting, by the measurement device, the measurement values stored in the buffer and additional information including information of a number of the measurement values to the control device using first frames transmitted at every second period, the second period is longer than the first period;
• generating, by the control device, time series data in which the measurement values are arranged in time series by using the additional information;
• and
• changing, by a drive device driving the motor, a relative position between the measurement device and the measurement object, the drive device is controlled by the control device,
• wherein the drive device has a function of acquiring a rotation position of the motor based on an output signal from the encoder in every third period to obtain position values that are temporarily stored in a buffer of the drive device,
• uses second frames that are transmitted in every fourth period longer than the third period to transmit the position values that are stored in the buffer of the drive device and second additional information including information of the number of the position values to the control device;
• and
• using, by the control device, the second additional information to generate second time series data in which the position values are arranged in time series.