# US 11,306,971 B2 · Heat exchanger with multistaged cooling

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- Number: US 11,306,971 B2
- Document ID: US11306971B2
- Status: Granted
- Kind: B2
- Application number: 16/668,447
- Filed: 2019-10-30
- Published: 2020-06-18
- Granted: 2022-04-19
- Earliest claimed: 2018-12-13
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Manoj A. Gajendra
- Web page: https://patentgrep.com/patent/US11306971B2

## CPC

- F28D 1/0246: {heat-exchange elements having several adjacent conduits forming a whole, e.g. blocks}
- F28F 9/002: {with fastening means for other structures}
- H01J 37/32834: {Exhausting}
- B01D 5/0003: {by using heat-exchange surfaces for indirect contact between gases or vapours and the cooling medium}
- B01D 5/0045: {Vacuum condensation}
- F28D 7/005: {the conduits for only one medium being tubes having bent portions or being assembled from bent tubes or being tubes having a toroidal configuration (F28D7/0008, F28D7/02, F28D7/04, F28D7/06, F28D7/14 take precedence)}
- F28D 7/0058: {the conduits for only one medium being tubes having different orientations to each other or crossing the conduit for the other heat exchange medium (F28D7/0008 takes precedence)}
- F28D 7/0075: {with particular circuits for the same heat exchange medium, e.g. with the same heat exchange medium flowing through sections having different heat exchange capacities or for heating or cooling the same heat exchange medium at different temperatures}
- F28D 7/08: the conduits being otherwise bent, e.g. in a serpentine or zig-zag (F28D7/10 takes precedence){(F28D7/0016 and F28D7/0033 take precedence)}
- F28D 9/04: the conduits being formed by spirally-wound plates or laminae
- F28D 2001/0266: {Particular core assemblies, e.g. having different orientations or having different geometric features}
- F28D 2001/0273: {having special shape, e.g. curved, annular}
- F28D 2021/0075: {for syngas or cracked gas cooling systems}
- H01J 37/32844: {Treating effluent gases}
- H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)}
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general)
- F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

A heat exchanger for abating compounds produced in semiconductor processes. When hot effluent flows into the heat exchanger, a coolant can be flowed to walls of a fluid heat exchanging surface within the heat exchanger. The heat exchanging surface can include a plurality of channel regions which creates a multi stage cross flow path for the hot effluent to flow down the heat exchanger. This flow path forces the hot effluent to hit the cold walls of the fluid heat exchanging surface, significantly cooling the effluent and preventing it from flowing directly into the vacuum pumps and causing heat damage. Embodiments described herein also relate to methods of forming a heat exchanger. The heat exchanger can be created by sequentially depositing layers of thermally conductive material on surfaces using 3-D printing, creating a much smaller footprint and reducing costs.

## Claims

### Claim 1

A heat exchanger configured to exchange heat with a flowing fluid, comprising:
a first heat exchanging flange having a central opening that extends through a connection surface of the first heat exchanging flange, wherein the connection surface is parallel to a first plane;
a second heat exchanging flange having a central opening that extends through a connection surface of the second heat exchanging flange, wherein the second heat exchanging flange is disposed at a distance in a first direction from the first heat exchanging flange;
a heat exchanging region disposed between the first heat exchanging flange and the second heat exchanging flange, wherein the heat exchanging region comprises:
an outer wall that is configured to enclose an internal region of the heat exchanger, wherein the outer wall and the internal region are disposed between the first heat exchanging flange and the second heat exchanging flange, and the internal region has a central axis; and
a plurality of channel regions that comprise an outer channel region, a central channel region, and a plurality of radial channel regions, wherein:
each of the plurality of channel regions has a heat exchanging surface that is within the internal region;
the plurality of radial channel regions are distributed in a radial array about the central axis such that a gap is disposed between each of the plurality of channel radial regions within the radial array, wherein an angle of a tangent formed at any point on the heat exchanging surface of each of the plurality of channel regions relative to the central axis is less than or equal to 70 degrees;
the outer channel region comprises an enclosed outer channel that is disposed between the outer wall and the internal region;
the central channel region comprises an enclosed central channel that is positioned at a central position within the internal region;
each of the plurality of radial channel regions comprises an enclosed radial channel that fluidly couples the central channel to the outer channel; and
the plurality of channel regions include at least two radial channel regions that are positioned a distance apart in the first direction.

### Claim 2 (depends on 1)

The heat exchanger of claim 1, further comprising a coolant inlet that is coupled to the central channel region, wherein the coolant inlet has an opening that is disposed at a position closer to the second heat exchanging flange than the first heat exchanging flange.

### Claim 3 (depends on 2)

The heat exchanger of claim 2, further comprising a coolant outlet that is coupled to the outer channel region, wherein the coolant outlet has an opening that is disposed at a position closer to the first heat exchanging flange than the second heat exchanging flange.

### Claim 4 (depends on 3)

The heat exchanger of claim 3, further comprising a fluid distribution system extending from the coolant inlet to the coolant outlet.

### Claim 5 (depends on 4)

The heat exchanger of claim 4, wherein the fluid distribution system comprises a plurality of fluid channels, each of the plurality of fluid channels configured to distribute coolant to any two of the central channel, the outer channel, and the plurality of radial channels.

### Claim 6 (depends on 1)

The heat exchanger of claim 1, further comprising a detachable hot trap region including at least one cone tray configured to collect particles passing through the heat exchanger.

### Claim 7 (depends on 6)

The heat exchanger of claim 6, further comprising a deflector configured to deflect gases passing through the heat exchanger.

### Claim 8 (depends on 6)

The heat exchanger of claim 6, further comprising a view port having an opening that extends through the outer wall, wherein the opening is oriented to allow a user positioned outside of the outer wall to see at least a portion of the at least one cone tray therethrough.

### Claim 9 (depends on 6)

The heat exchanger of claim 6, wherein each of the radial channels is wedge shaped.

### Claim 10 (depends on 1)

The heat exchanger of claim 1, wherein the angle of a tangent formed at any point on the heat exchanging surface of each of the plurality of channel regions relative to the central axis is less than or equal to 45 degrees.