Quick release purge valve and substrate container using same
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
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AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
Estimating the term…
A quick release purge valve and a substrate container using same are provided. The container includes a base which has a cover plate and a bottom plate. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.
A quick release purge valve used for a substrate container including a base having a cover plate and a bottom plate, the quick release purge valve comprising:
A quick release purge valve used for a substrate container, comprising:
A substrate container, comprising:
A method for loading at least on quick release purge valve in a substrate container, the quick release purge valve comprising a snap member having a circular structure, a gasket fitting defining an airflow conduit and a valve element, wherein the gasket fitting has an outer wall and a flange surface formed on the outer wall, and the substrate container is provided with at least one first opening and at least one second opening corresponding to the first opening, the second opening is provided with a fitting sleeve, the method comprising following steps:
A method for unloading at least one quick purge release valve from a substrate container providing at least one first opening and at least one second opening corresponding to the first opening, the quick release purge valve comprising a snap member having a circular structure, a gasket fitting defining an airflow conduit and a valve positioned in the airflow conduit, wherein the gasket fitting has an outer wall and a flange surface formed on the outer wall, the snap member is detachably received within the first opening with the circular structure matching the flange surface to thereby restrict the gasket fitting inbetween the first opening and the second opening, the method comprising following steps:
Dependencies are inferred from the claim text.