Device for microelectrodeposition through laser assisted flexible following tool electrode and deposition method using the device thereof

A device for microelectrodeposition through a laser assisted flexible following tool electrode, comprising a workpiece processing system, a laser irradiation system, and a motion control system, wherein

• the workpiece processing system comprises an X-Y two-coordinate workbench, a vertical lifting workbench, a direct current (DC) pulse power supply, a working tank, a flexible following tool anode, and a cathode substrate;
• the flexible following tool anode is connected to a positive electrode of the DC pulse power supply and is clamped by a work arm of the X-Y two-coordinate workbench;
• the cathode substrate is connected to a negative electrode of the DC pulse power supply;
• the flexible following tool anode and the cathode substrate are both arranged in an electrolyte in the working tank, and when energized, an electrochemical loop is formed;
• and the working tank is arranged on the vertical lifting workbench;
• the laser irradiation system comprises a pulsed laser, a reflector, and a focusing lens;
• a laser beam emitted by the pulsed laser is reflected by the reflector, then focused by the focusing lens, and then irradiated on a lower section of the flexible following tool anode;
• and
• the motion control system comprises a computer and a motion control card;
• the computer controls the pulsed laser and the motion control card, and the motion control card controls the X-Y two-coordinate workbench and the vertical lifting workbench;
• wherein the flexible following tool anode comprises an upper section, an elastic middle section, and the lower section, and the upper section and the lower section are connected by the elastic middle section;
• the upper section comprises an insoluble metal wire with sidewall insulation, and the lower section comprises a shielding deposition mold with a hollow structure.