Method for refining argon gas and recovering and refining apparatus for argon gas
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsYasushi Kurosawa, Hideaki Matsushima
Life of this patent
Estimating the term…
Loading patent…
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsYasushi Kurosawa, Hideaki Matsushima
Estimating the term…
A method is provided for refining an argon gas, in which oxygen is added to the argon gas containing hydrogen, carbon monoxide (CO), and oxygen as impurities so that the hydrogen and the CO are converted into water and carbon dioxide in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen is converted into the water; the method including: monitoring the hydrogen, the CO, and the oxygen on an outlet side of the catalyst tower; and at least one of adding the oxygen to the argon gas when any one of the hydrogen and the CO is detected on the outlet side of the catalyst tower, and adding the hydrogen when the oxygen is detected, wherein the oxygen or the hydrogen to be added is intermittently added to the catalyst tower relative to continuous supply of the argon gas to the catalyst tower.
A method for refining an argon gas, in which oxygen is added to the argon gas containing at least one of hydrogen, carbon monoxide, and oxygen as impurities so that the hydrogen and the carbon monoxide contained in the argon gas are converted into water and carbon dioxide by using a catalytic reaction in a catalyst tower, or hydrogen is added to the argon gas so that the oxygen contained in the argon gas is converted into the water by using a catalyst reaction in the catalyst tower, and at least one of the hydrogen, the carbon monoxide, and the oxygen is thereby removed from the argon gas,
Dependencies are inferred from the claim text.