# US 11,305,397 B2 · Lapping system that includes a lapping plate temperature control system, and related methods

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- Number: US 11,305,397 B2
- Document ID: US11305397B2
- Status: Granted
- Kind: B2
- Application number: 16/430,540
- Filed: 2019-06-04
- Published: 2019-12-19
- Granted: 2022-04-19
- Earliest claimed: 2018-06-18
- Assignees: Seagate Technology LLC
- Applicants: Seagate Technology LLC
- Inventors: Andrew Habermas; Dat Quach; Jeff O'Konski; Yuhong Xiong; Ricky Anderson; Joshua Zierhut
- Web page: https://patentgrep.com/patent/US11305397B2

## CPC

- B24B 37/048: {of sliders and magnetic heads of hard disc drives or the like}
- B24B 37/015: Temperature control
- B24B 37/10: for single side lapping
- G11B 5/3163: {Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers}
- G11B 5/3169: {Working or finishing the interfacing surface of heads, e.g. lapping of heads}
- G11B 5/6005: {Specially adapted for spacing from a rotating disc using a fluid cushion}
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)

## Abstract

The present disclosure includes a lapping system that includes a temperature control system system to heat or cool the lapping plate while lapping. The temperature control system can include a closed circuit fluid system and/or one or more electrical resistive heating elements. In some embodiments that cooling system can control the temperature of the lapping plate during lapping to within +/−5° C., or even +/−0.5° C.

## Claims

### Claim 1

A method of lapping a slider or row bar having a plurality of sliders, wherein the method comprises:
a) lapping the slider or the row bar having a plurality of sliders by contacting a surface of the slider or row bar having a plurality of sliders with a rotating lapping plate, wherein the slider comprises one or more electronic lapping guides or wherein each of the plurality of sliders comprises one or more electronic lapping guides;
b) controlling the temperature of the lapping plate to a target temperature +/−0.3° C. during at least a portion of the lapping, wherein controlling comprises:
i) measuring a surface of the lapping plate that faces the surface of the slider or row bar having a plurality of sliders during lapping, wherein the temperature of the surface of the lapping plate that faces the surface of the slider or row bar is measured via a temperature sensor comprising an infrared sensor; and
ii) providing the measured temperature of the surface of the lapping plate to a control system that controls the temperature of the lapping plate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the row bar is a first row bar and the target temperatures is a first target temperature +/−0.3° C., and further comprising:
a) lapping a second row bar having a plurality of sliders by contacting a surface of the second row bar having a plurality of sliders with the rotating lapping plate, wherein each of the plurality of sliders comprises one or more electronic lapping guides;
b) controlling the temperature of the lapping plate to a second target temperature +/−0.3° C. during at least a portion of the lapping, wherein the second target temperature is different than the first target temperature.

### Claim 3 (depends on 1)

The method of claim 1, wherein controlling comprises supplying a flow of temperature-controlled fluid to the lapping plate via a closed fluid supply system, wherein the fluid is supplied at a temperature so that the temperature of the lapping plate is controlled to the target temperature +/−0.3° C. during at least a portion of the lapping.

### Claim 4 (depends on 3)

The method of claim 3, wherein the fluid is heated or cooled to control the temperature of the fluid supplied to the lapping plate to control the temperature of the lapping plate.

### Claim 5 (depends on 4)

The method of claim 4, further comprising one or more electrical resistive heating elements coupled to the lapping plate, wherein the fluid is cooled to lower the temperature of the fluid to lower the temperature of the lapping plate or the temperature of the lapping plate is increased by supplying electrical power to the one or more electrical resistive heating elements to increase the temperature of the lapping plate.

### Claim 6 (depends on 1)

The method of claim 1, wherein the lapping plate is made of material chosen from tin, tin alloy, aluminum, copper, combinations thereof.

### Claim 7 (depends on 1)

The method of claim 1, wherein the temperature sensor further comprises a thermocouple sensor.

### Claim 8

A lapping system comprising:
a) a mounting structure that is configured to removably couple a row bar comprising a plurality of sliders, wherein each of the plurality of sliders comprises one or more electronic lapping guides,
b) a lapping plate having a lapping surface that is operable to rotate and contact the row bar for lapping each slider; and
c) a temperature control system operatively coupled to the lapping plate and configured to control the temperature of the lapping plate to a target temperature +/−0.3° C. during at least a portion of the lapping, wherein the temperature control system comprises:
i) a temperature sensor comprising an infrared sensor; and
ii) a controller that is configured to execute program instructions comprising:
A measuring a surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping, wherein the temperature of the surface of the lapping plate that faces the surface of the row bar is measured via the infrared sensor; and
B) providing the measured temperature of the surface of the lapping plate to the controller to adjust the temperature of the lapping plate.

### Claim 9 (depends on 8)

The lapping system of claim 8, wherein the temperature is made of material chosen from tin, tin alloy, aluminum, copper, combinations thereof.

### Claim 10 (depends on 8)

The lapping system of claim 8, wherein the temperature control system comprises a closed fluid supply system that is coupled to the lapping plate so that heat transfers to the lapping plate from fluid or from the lapping plate to fluid, when fluid flows through the closed fluid supply system.

### Claim 11 (depends on 10)

The lapping system of claim 10, wherein the temperature control system is operative to heat or cool the fluid to control the temperature of the fluid supplied to the lapping plate to control the temperature of the lapping plate.

### Claim 12 (depends on 11)

The lapping system of claim 11, further comprising one or more electrical resistive heating elements coupled to the lapping plate, wherein the temperature control system is operative to cool the fluid to lower the temperature of the fluid to lower the temperature of the lapping plate and the temperature control system is operative to heat the lapping plate by supplying electrical power to the one or more electrical resistive heating elements to increase the temperature of the lapping plate.

### Claim 13 (depends on 8)

The lapping system of claim 8, wherein the temperature control system comprises one or more electrical resistive heating elements coupled to the lapping plate, wherein the temperature control system is operative to heat the lapping plate by supplying electrical power to the one or more electrical resistive heating elements to increase the temperature of the lapping plate.

### Claim 14 (depends on 8)

The lapping system of claim 8, wherein the temperature sensor further comprises a thermocouple sensor.

### Claim 15 (depends on 8)

The lapping system of claim 8, wherein the lapping plate has a thermal conductivity of 10 W/(m*K) or more.

### Claim 16 (depends on 8)

The system of claim 8, wherein the mounting structure comprises;
a) an arm structure; and
b) a carrier removably attached to the arm structure, wherein the row bar is removably attached to the carrier.

### Claim 17

A lapping system comprising:
a) a mounting structure that is configured to removably couple a row bar comprising a plurality of sliders, wherein each of the plurality of sliders comprises one or more electronic lapping guides,
b) a lapping plate having a lapping surface that is operable to rotate and contact the row bar for lapping each slider; and
c) a temperature control system operatively coupled to the lapping plate and configured to control the temperature of the lapping plate to a target temperature +/−0.3° C. during at least a portion of the lapping, wherein the temperature control system comprises:
i) a temperature sensor comprising an infrared sensor;
ii) a controller that is configured to execute program instructions comprising:
A) measuring a surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping, wherein the temperature of the surface of the lapping plate that faces the surface of the row bar is measured via the infrared sensor; and
B) providing the measured temperature of the surface of the lapping plate to the controller to adjust the temperature of the lapping plate; and
iii) one or more electrical resistive heating elements coupled to the lapping plate, wherein the temperature control system is operative to heat the lapping plate by supplying electrical power to the one or more electrical resistive heating elements to increase the temperature of the lapping plate.

### Claim 18

A lapping system comprising:
a) a mounting structure that is configured to removably couple a row bar comprising a plurality of sliders, wherein each of the plurality of sliders comprises one or more electronic lapping guides,
b) a lapping plate having a lapping surface that is operable to rotate and contact the row bar for lapping each slider; and
c) a temperature control system operatively coupled to the lapping plate and configured to control the temperature of the lapping plate to a target temperature +/−0.3° C. during at least a portion of the lapping, wherein the temperature control system comprises:
i) a temperature sensor comprising an infrared sensor;
ii) a controller that is configured to execute program instructions comprising:
A) measuring a surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping, wherein the temperature of the surface of the lapping plate that faces the surface of the row bar is measured via the infrared sensor; and
B) providing the measured temperature of the surface of the lapping plate to the controller to adjust the temperature of the lapping plate; and
iii) a closed fluid supply system that is coupled to the lapping plate so that heat transfers to the lapping plate from fluid or from the lapping plate to fluid, when fluid flows through the closed fluid supply system, to control the surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping.

### Claim 19 (depends on 18)

The lapping system of claim 18, wherein the temperature control system is operative to cool the fluid to lower the temperature of the fluid to lower the temperature of the surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping, and wherein the temperature control system is operative to heat the fluid to increase the temperature of the fluid to increase the temperature of the surface of the lapping plate that faces the surface of the row bar having a plurality of sliders during lapping.