# US 11,305,277 B2 · Micro-structured mold-core of microfluidic chip and its manufacturing method

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- Number: US 11,305,277 B2
- Document ID: US11305277B2
- Status: Granted
- Kind: B2
- Application number: 16/634,100
- Filed: 2018-12-10
- Published: 2021-09-23
- Granted: 2022-04-19
- Earliest claimed: 2018-12-10
- Assignees: Shenzhen University
- Applicants: Shenzhen University
- Inventors: Yanjun Lu; Fumin Chen; Xiaoyu Wu; Chaolan Zhou; Qiyang Peng; Jiatao Zhang
- Web page: https://patentgrep.com/patent/US11305277B2

## CPC

- B01L 3/502707: {characterised by the manufacture of the container or its components}
- B01L 3/502715: {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces}
- B29C 33/3842: {Manufacturing moulds, e.g. shaping the mould surface by machining}
- B29C 45/26: Moulds
- B29C 45/37: Mould cavity walls {, i.e. the inner surface forming the mould cavity, e.g. linings}
- B01L 2200/12: Specific details about manufacturing devices
- B01L 2300/0883: Serpentine channels
- B29C 2045/0094: {injection moulding of small-sized articles, e.g. microarticles, ultra thin articles}
- B29L 2031/756: {Microarticles, nanoarticles}
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00)
- B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES

## Abstract

A micro-structured mold-core of a microfluidic chip and its manufacturing method, which includes the steps of: installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center; rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track, to form a micro-projection array structure with a specific shape; finishing a surface of the micro-projection array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track, to form a desired micro-projection array structure; and installing the mold-core on an injection molding machine, and adding particle material of polymer for micro injection molding to form a microfluidic chip, or installing the mold-core on a hot-embossing machine, and adding block material of polymer for hot embossing to form a microfluidic chip.

## Claims

### Claim 1

A manufacturing method of a microfluidic chip, comprising the following steps:
installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center;
rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track, to form a micro convex array structure with a specific shape;
finishing a surface of the micro convex array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track, to form a desired micro convex array structure, and wherein the size of the micro convex array structure formed by rough-milling is larger than the size of which formed by finishing; and
installing the mold-core on an injection molding machine, and adding particle material of polymer for micro injection molding to form a microfluidic chip, and a surface of the microfluidic chip has a micro-grooved array structure.

### Claim 2 (depends on 1)

The manufacturing method of a microfluidic chip according to claim 1, wherein a spindle speed of the five-axis machining center is in a range from 5000 to 20,000 rpm, and a feed depth of the micro-milling cutter is in a range from 0.1 to 50 micrometers, and a feed speed of the micro-milling cutter is in a range from 10 to 1000 mm/min.

### Claim 3 (depends on 1)

The manufacturing method of a microfluidic chip according to claim 1, wherein the micro-grooved array structure comprises a plurality of micro-channels connected in sequence, and a groove depth of each micro-channel is in a range from 10 to 800 microns.

### Claim 4 (depends on 3)

The manufacturing method of a microfluidic chip according to claim 3, wherein each of the micro-channels comprises a first channel, a second channel and a transition channel connected between the first channel and the second channel, and a trench interval between the first channel and the second channel ranges from 10 to 500 microns.

### Claim 5 (depends on 1)

The manufacturing method of a microfluidic chip according to claim 1, wherein the material of the mold-core comprises ceramic, diamond, die steel or hard alloy.

### Claim 6 (depends on 1)

The manufacturing method of a microfluidic chip according to claim 1, wherein the material of the microfluidic chip comprises one of polyamide, polyethylene terephthalate, polydimethylsiloxane, polymethyl methacrylate, polypropylene or polycarbonate, or a mixture of two or more.

### Claim 7 (depends on 4)

The manufacturing method of a microfluidic chip according to claim 4, wherein the first channel, the second channel and the transition channel each comprises:
a first side surface;
a second side surface disposed opposite to the first side surface; and
a bottom surface, both ends of which are respectively connected to the first side surface and the second side surface;
the first side surface, the bottom surface and the second side surface together form a V-shape, a U-shape or a rectangle.

### Claim 8

A manufacturing method of a microfluidic chip, comprising the following steps:
installing a mold-core on a worktable of a five-axis machining center, and installing a micro-milling cutter and a fine milling-grinding tool on a tool holder of the five-axis machining center;
rough-milling a surface of the mold-core using the micro-milling cutter according to a preset first machining track to form a micro convex array structure with a specific shape;
finishing a surface of the micro convex array structure formed by rough-milling using the fine milling-grinding tool according to a preset second machining track to form a desired micro convex array structure, and wherein the size of the micro convex array structure formed by rough-milling is larger than the size of which formed by finishing; and
installing the mold-core on a hot-embossing machine, and adding block material of polymer for hot embossing to form a microfluidic chip, and a surface of the microfluidic chip has a micro-grooved array structure.

### Claim 9 (depends on 8)

The manufacturing method of a microfluidic chip according to claim 8, wherein a spindle speed of the five-axis machining center is in a range from 5000 to 20,000 rpm, and a feed depth of the micro-milling cutter is in a range from 0.1 to 50 micrometers, and a feed speed of the micro-milling cutter is in a range from 10 to 1000 mm/min.

### Claim 10 (depends on 8)

The manufacturing method of a microfluidic chip according to claim 8, wherein the micro-grooved array structure comprises a plurality of micro-channels connected in sequence, and a groove depth of each micro-channel is in a range from 10 to 800 microns.

### Claim 11 (depends on 10)

The manufacturing method of a microfluidic chip according to claim 10, wherein each of the micro-channels comprises a first channel, a second channel and a transition channel connected between the first channel and the second channel, and a trench interval between the first channel and the second channel ranges from 10 to 500 microns.

### Claim 12 (depends on 8)

The manufacturing method of a microfluidic chip according to claim 8, wherein the material of the mold-core comprises ceramic, diamond, die steel or hard alloy.

### Claim 13 (depends on 8)

The manufacturing method of a microfluidic chip according to claim 8, wherein the material of the microfluidic chip comprises one of polyamide, polyethylene terephthalate, polydimethylsiloxane, polymethyl methacrylate, polypropylene or polycarbonate, or a mixture of two or more.

### Claim 14 (depends on 11)

The manufacturing method of a microfluidic chip according to claim 11, wherein the first channel, the second channel and the transition channel each comprises:
a first side surface;
a second side surface disposed opposite to the first side surface; and
a bottom surface, both ends of which are respectively connected to the first side surface and the second side surface;
the first side surface, the bottom surface and the second side surface together form a V-shape, a U-shape or a rectangle.

### Claim 15

A micro-structured mold-core of a microfluidic chip with a mold-core body, wherein,
a micro convex array structure being disposed on a surface of the mold-core body, wherein the micro convex array structure is formed by rough-milling the surface of the mold-core body with a micro-milling cutter to form a micro convex array structure with a specific shape, and finishing the surface of the micro convex array structure formed by rough-milling using a fine milling-grinding tool, wherein the micro convex array structure comprises a plurality of micro convexities connected in sequence, and each of the micro convexities comprises a first connection section, a second connection section and a transition section connected between the first connection section and the second connection section.

### Claim 16 (depends on 15)

The micro-structured mold-core of a microfluidic chip according to claim 15, wherein the first connection section is a straight section, the second connection section is a straight section, and the transition section is an arc-shaped or a straight section.

### Claim 17 (depends on 15)

The micro-structured mold-core of a microfluidic chip according to claim 15, wherein the heights of the first connection section, the second connection section and the transition section each of which is in a range from 10 to 800 microns, and the widths of the first connection section, the second connection section and the transition section each of which is in a range from 10 to 500 microns, and an interval distance between the first connection section and the second connection section is in a range from 10 to 500 microns.

### Claim 18 (depends on 15)

The micro-structured mold-core of a microfluidic chip according to claim 15, wherein the first connection section, the second connection section and the transition section each comprises:
a third side surface,
a fourth side surface opposite to the third side surface; and
a top surface, two ends of which are respectively connected to the third side surface and the fourth side surface;
the third side surface, the top surface and the fourth side surface together form a V shape, a U shaped or a rectangle.
