Electron gun and electron beam device
AssigneeJEOL Ltd.
InventorsAkihiro Ikeda, Norikazu Arima
Life of this patent
Estimating the term…
Loading patent…
AssigneeJEOL Ltd.
InventorsAkihiro Ikeda, Norikazu Arima
Estimating the term…
An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.
An electron gun that accelerates electrons at a predetermined voltage and discharges the accelerated electrons, the electron gun comprising:
An electron gun comprising:
Dependencies are inferred from the claim text.