Integrated sensor apparatus with pressure sensing element and flow sensing element
AssigneeHoneywell International Inc.
InventorsRichard Charles Sorenson, Steven Lowery, Ian Bentley
Life of this patent
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Abstract
An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.
Claims18
An apparatus, comprising:
- a substrate;
- a cover member comprising a flow tunnel, wherein the cover member is disposed on the substrate and configured to enable a gaseous substance to flow through the flow tunnel;
- a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel and configured for sensing a flow rate of the gaseous substance through the flow tunnel;
- a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel and configured for sensing a pressure of the gaseous substance in the flow tunnel;
- and
- a processing circuitry configured to calculate a thermal conductivity of the gaseous substance based on the flow rate and the pressure sensed by the flow sensing element and the pressure sensing element respectively.
A system for calculating a thermal conductivity of a gaseous substance, the system comprising:
- a cover member comprising a flow tunnel, wherein the cover member is configured to enable the gaseous substance to flow through the flow tunnel
- a flow sensing element disposed on a substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel;
- a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel;
- and
- a processing circuitry disposed on the substrate, wherein the processing circuitry is electronically coupled to the flow sensing element and the pressure sensing element and configured to calculate the thermal conductivity of the gaseous substance based on a flow rate and a pressure sensed by the flow sensing element and the pressure sensing element respectively.
Dependencies are inferred from the claim text.