Kikuchi diffraction detector
AssigneeBruker Nano, Inc.
InventorDaniel Radu Goran
Life of this patent
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Abstract
A detector for Kikuchi diffraction comprising a detector body and a detector head mountable to each other. The detector body comprises a body part which is enclosing a photodetector configured for detecting incident radiation and further comprises a vacuum window arranged upstream the photodetector with respect to a propagation direction of the incident radiation, a first body mounting portion configured to be mounted to a SEM chamber port and a second body mounting portion. The detector head comprises a scintillation screen and a head mounting portion configured to be mounted to the second body mounting portion.
Claims14
Detector for Kikuchi diffraction, the detector comprising:
- a detector body and a detector head mountable to each other;
- the detector body comprising a body part enclosing a photodetector configured for detecting incident radiation;
- a vacuum window arranged upstream the photodetector with respect to a propagation direction of the incident radiation;
- and a first body mounting portion configured to be mounted to a SEM chamber port and a second body mounting portion, and
- the detector head comprising a scintillation screen and a head mounting portion configured to be mounted to the second body mounting portion, wherein
- the second body mounting portion is configured to be inserted through the SEM chamber port, before the first mounting portion is mounted to an outer side of the SEM chamber port.
Dependencies are inferred from the claim text.