# US 11,299,817 B2 · Holder for holding substrate and system for plating > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,299,817 B2 - Document ID: US11299817B2 - Status: Granted - Kind: B2 - Application number: 16/609,884 - Filed: 2018-06-12 - Published: 2020-06-25 - Granted: 2022-04-12 - Earliest claimed: 2017-06-28 - Assignees: Ebara Corporation - Applicants: Ebara Corporation - Inventors: Shota Moriyama; Matsutaro Miyamoto - Web page: https://patentgrep.com/patent/US11299817B2 ## CPC - C25D 17/06: Suspending or supporting devices for articles to be coated - C25D 17/08: {Supporting} racks {, i.e. not for suspending} - C25D 17/001: {Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells} - C25D 17/005: {Contacting devices} - C25D 17/008: {Current shielding devices} - C25D 21/00: Processes for servicing or operating cells for electrolytic coating - C25D 7/123: {Semiconductors first coated with a seed layer or a conductive layer} - C25D 21/02: Heating or cooling - C25D 21/12: Process control or regulation (controlling or regulating in general G05) - C25D 21/18: of electrolytes (C25D21/22 takes precedence) - C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR ## Abstract There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact. ## Claims ### Claim 1 A holder for holding a substrate, comprising: a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first substrate contact configured to supply an electric current to the first surface of the substrate, at least one first external connection contact, and at least one first wiring configured to electrically connect the at least one first substrate contact with the at least one first external connection contact, wherein the second holding member has at least one second substrate contact configured to supply an electric current to the second surface of the substrate, at least one second external connection contact, and at least one second wiring configured to electrically connect the at least one second substrate contact with the at least one second external connection contact, and wherein the at least one first external connection contact and the at least one second external connection contact are electrically independent, and the first holding member has: a first main body portion having the first opening portion and the at least one first substrate contact; a first arm portion having at least the one first external connection contact; and a first wiring storage portion disposed between the first main body portion and the first arm portion and configured to store an extra length of the at least one first wiring. ### Claim 2 (depends on 1) The holder according to claim 1, wherein the first holding member has a plurality of the first substrate contacts, a plurality of the first external connection contacts, and a plurality of the first wirings configured to electrically connect the plurality of the first substrate contacts with the plurality of the first external connection contacts. ### Claim 3 (depends on 1) The holder according to claim 1, wherein the second holding member has a second arm portion, and the at least one second external connection contact is disposed on the second arm portion, and wherein the at least one first external connection contact and the at least one second external connection contact are positioned at left and right ends of the holder respectively. ### Claim 4 (depends on 1) The holder according to claim 1, wherein the first holding member has a first arm portion and has first and second positioning portions on both sides of the first arm portion respectively to position the holder in a plating tank. ### Claim 5 (depends on 1) The holder according to claim 1, wherein the second holding member has a second main body portion having the second opening portion, and wherein the first main body portion and the second main body portion have positioning mechanisms configured to be brought into engagement with each other. ### Claim 6 (depends on 1) The holder according to claim 1, wherein the second holding member has a second main body portion having the second opening portion and a second arm portion provided at one end side of the second main body portion, and with the first holding member and the second holding member staying in engagement with each other, the first arm portion and the second arm portion are aligned in a direction directed from the first and second main body portions towards the first and second arm portions. ### Claim 7 (depends on 1) The holder according to claim 1, wherein the first wiring storage portion is formed integrally with a first attachment portion to attach the first main body portion to the first arm portion. ### Claim 8 (depends on 7) The holder according to claim 7, wherein the first wiring storage portion has a first projecting portion projecting towards the first main body portion, and wherein the first main body portion has two second projecting portions projecting on both sides of the first projecting portion of the first wiring storage portion. ### Claim 9 (depends on 1) The holder according to claim 1, wherein a wall of the first wiring storage portion overlaps an outer side of a wall of the first main body portion on a side constituting an outer surface side of the holder at a coupling portion of the first wiring storage portion with the first main body portion. ### Claim 10 (depends on 1) The holder according to claim 1, wherein the first holding member is configured such that a coupling portion of the first wiring storage portion with the first main body portion is positioned above a plating liquid level when the holder is disposed in a plating tank. ### Claim 11 (depends on 1) The holder according to claim 1, wherein the first holding member has a first substrate contact configured to supply an electric current to the first surface of the substrate, wherein the second holding member has a second substrate contact configured to supply an electric current to the second surface of the substrate, and wherein a first contact fixing portion configured to fix the first substrate contact within the first holding member and a second contact fixing portion configured to fix the second substrate contact within the second holding member do not overlap each other with the first holding member and the second holding member kept in engagement with each other. ### Claim 12 (depends on 11) The holder according to claim 11, wherein the first holding member has a first seal holder provided on an outer side of the first opening portion, wherein the second holding member has a second seal holder provided on an outer side of the second opening portion, wherein the first and second substrate contacts are attached to the first and second seal holders by the first and second contact fixing portions, and wherein a first holder fixing portion configured to fix the first seal holder within the first holding member and a second holder fixing portion configured to fix the second seal holder within the second holding member do not overlap each other with the first holding member and the second holding member kept in engagement with each other. ### Claim 13 (depends on 1) The holder according to claim 1, wherein the first holding member has a first seal provided on a circumference of the first opening portion, wherein the second holding member has a second seal provided on a circumference of the second opening portion, and wherein an outer seal is provided further on at least one of the first holding member and the second holding member further outwards than the first seal and the second seal. ### Claim 14 (depends on 1) The holder according to claim 1, wherein the first and second opening portions have a rectangular shape. ### Claim 15 A system for plating, comprising: a holder for holding a substrate; a substrate attaching/detaching portion configured to attach/detach the substrate to/from the holder; a plating tank configured to apply a plating treatment to the holder holding the substrate; and a transport machine configured to transport the holder, wherein the holder comprises: a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first substrate contact configured to supply an electric current to the first surface of the substrate, at least one first external connection contact, and at least one first wiring configured to electrically connect the at least one first substrate contact with the at least one first external connection contact, wherein the second holding member has at least one second substrate contact configured to supply an electric current to the second surface of the substrate, at least one second external connection contact, and at least one second wiring configured to electrically connect the at least one second substrate contact with the at least one second external connection contact, and wherein the at least one first external connection contact and the at least one second external connection contact are electrically independent, and the first holding member has: a first main body portion having the first opening portion and the at least one first substrate contact; a first arm portion having at least the one first external connection contact; and a first wiring storage portion disposed between the first main body portion and the first arm portion and configured to store an extra length of the at least one first wiring.