# US 11,299,805 B2 · Plasma corrision resistive heater for high temperature processing

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- Number: US 11,299,805 B2
- Document ID: US11299805B2
- Status: Granted
- Kind: B2
- Application number: 16/296,343
- Filed: 2019-03-08
- Published: 2019-07-04
- Granted: 2022-04-12
- Earliest claimed: 2014-06-27
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Abdul Aziz Khaja; Ren-Guan Duan; Amit Kumar Bansal; Jianhua Zhou; Juan Carlos Rocha-Alvarez
- Web page: https://patentgrep.com/patent/US11299805B2

## CPC

- C23C 16/4405: {Cleaning of reactor or parts inside the reactor by using reactive gases}
- C23C 16/4581: {characterised by material of construction or surface finish of the means for supporting the substrate}
- F02B 75/045: {by means of a variable connecting rod length}
- F02D 15/02: by alteration or displacement of piston stroke
- F16C 3/28: Adjustable cranks or eccentrics
- F16C 7/06: Adjustable connecting-rods
- F16D 41/16: the action being reversible
- H10P 72/0432: {mainly by conduction}
- H10P 72/7616: {characterised by a coating, a hardness or a material}
- H10P 72/7626: {characterised by the construction of the shaft}
- F16C 2360/22: Internal combustion engines
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- F02B: INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL (gas-turbine plants F02C; hot-gas or combustion-product positive-displacement engine plants F02G)
- F02D: CONTROLLING COMBUSTION ENGINES (vehicle fittings, acting on a single sub-unit only, for automatically controlling vehicle speed B60K31/00; conjoint control of vehicle sub-units of different type or different function, road vehicle drive control systems for purposes other than the control of a single sub-unit B60W)
- F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16D: COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Implementations described herein protect a substrate support from corrosive cleaning gases used at high temperatures. In one embodiment, a substrate support has a shaft having an outer wall. The substrate support has a heater. The heater has a body having a top surface, a side surface and a bottom surface extending from the outer wall of the shaft. The top surface is configured to support a substrate during plasma processing of the substrate. A covering is provided for at least two of the top surface, side surface and bottom surface. The covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius. A sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body.

## Claims

### Claim 1

A substrate support, comprising:
a shaft having an outer wall;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending from the outer wall to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius; and
a sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body.

### Claim 2 (depends on 1)

The substrate support of claim 1 wherein the covering is a coating of material selected from a group consisting of an aluminum silicon magnesium yttrium oxygen compound, Y4Al2O9 compound and Y2−xZrxO3 solid solution mixed material (HPM), yttria (Y2O3), erbium oxide (Er2O3), and zirconium dioxide (ZrO2).

### Claim 3 (depends on 1)

The substrate support of claim 1 wherein the covering is a coating comprising aluminum silicon magnesium yttrium oxygen compound (AsMy).

### Claim 4 (depends on 1)

The substrate support of claim 1, wherein the covering for the top surface comprises:
an edge ring; and
a removable cover plate.

### Claim 5 (depends on 4)

The substrate support of claim 4, wherein the edge ring and the removable cover plate comprises bulk AsMy.

### Claim 6 (depends on 4)

The substrate support of claim 4, wherein the edge ring and the removable cover plate are formed from AlN coated with AsMy.

### Claim 7 (depends on 3)

The substrate support of claim 3, wherein the AsMy coating is about 8 mil thick.

### Claim 8 (depends on 6)

The substrate support claim 6, wherein the AsMy coating is heat treated.

### Claim 9 (depends on 1)

The substrate support of claim 1, wherein the sleeve further comprises:
a gap formed between the sleeve and the bottom surface of the heater, wherein the purge gas flowing into the space flows towards the heater and exits the space through the gap.

### Claim 10 (depends on 1)

The substrate support of claim 1, wherein the sleeve further comprises:
a second space formed between the sleeve and the bottom surface of the heater, wherein the purge gas flowing into the second space flows away from the shaft.

### Claim 11

A substrate support, comprising:
a shaft having an outer wall;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending from the outer wall to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least two of the top surface, the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius; and
a sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body;
a thermal isolator coupled to a bottom of the shaft opposite the heater, wherein the sleeve is sealingly attached to the thermal isolator; and
a purge gas line passing through the thermal isolator, wherein the purge gas exits the purge gas line into the space between the sleeve and the shaft.

### Claim 12

A substrate support, comprising:
a shaft having an outer wall;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending from the outer wall to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least two of the top surface, the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius;
a sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body; and
a thermal isolator coupled to a bottom of the shaft opposite the heater, wherein the sleeve is sealingly attached to the thermal isolator, wherein the sleeve is attached to the thermal isolator and the sleeve is not in contact with the shaft.

### Claim 13 (depends on 1)

The substrate support of claim 1, wherein the sleeve is not in direct contact with either the shaft or the heater.

### Claim 14

A high temperature processing reactor, comprising:
a chamber body having a lid, walls and bottom forming an interior volume;
an inlet for gas to enter the interior volume and form a plasma;
a pumping port; and
a substrate support, the substrate support comprising:
a shaft having an outer wall;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending from the outer wall to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius; and
a sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body.

### Claim 15 (depends on 14)

The processing reactor of claim 14, wherein the sleeve further comprises:
a gap formed between the sleeve and the bottom surface of the heater, wherein the purge gas flowing into the space flows towards the heater and exits the space through the gap.

### Claim 16 (depends on 15)

The processing reactor of claim 15, wherein the sleeve further comprises:
a portion extending away from the shaft along the bottom surface of the body, the space defined between the shaft and the sleeve continuing along the bottom surface of the body.

### Claim 17 (depends on 14)

The processing reactor of claim 14, wherein the covering for the top surface comprises:
an edge ring; and
a removable cover plate, wherein the edge ring and the removable cover plate comprise material selected from a group consisting of an aluminum silicon magnesium yttrium oxygen compound, Y4Al2O9 compound and Y2−xZrxO3 solid solution mixed material (HPM), yttria (Y2O3), erbium oxide (Er2O3), and zirconium dioxide (ZrO2).

### Claim 18 (depends on 14)

The processing reactor of claim 14, wherein the sleeve is not in direct contact with either the shaft or the heater.

### Claim 19

A high temperature processing reactor, comprising:
a chamber body having a lid, walls and bottom forming an interior volume;
an inlet for gas to enter the interior volume and form a plasma;
a pumping port; and
a substrate support, the substrate support comprising:
a shaft having an outer wall;
a heater, the heater comprising:
a body having a top surface, a side surface and a bottom surface extending from the outer wall to the shaft, the top surface configured to support a substrate thereon during plasma processing; and
a covering provided for at least two of the top surface, the side surface and the bottom surface, wherein the covering is selected to resist corrosion of the body at temperatures in excess of about 400 degrees Celsius; and
a sleeve circumscribing the shaft, the sleeve and the outer wall of the shaft forming a space therebetween, the space adapted to flow a purge gas therethrough in a direction toward the body;
a thermal isolator coupled to a bottom of the shaft opposite the heater, wherein the sleeve is sealingly attached to the thermal isolator; and
a purge gas line passing therethrough the thermal isolator, wherein the purge gas exits the purge gas line into the space between the sleeve and the shaft.