# US 11,299,646 B2 · Inkjet printing process

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- Number: US 11,299,646 B2
- Document ID: US11299646B2
- Status: Granted
- Kind: B2
- Application number: 16/610,548
- Filed: 2018-04-27
- Published: 2021-05-27
- Granted: 2022-04-12
- Earliest claimed: 2017-05-05
- Assignees: Luxembourg Institute of Science and Technology (List)
- Applicants: Luxembourg Institute of Science and Technology (List)
- Inventors: Nicolas Godard; Daniele Sette; Sebastjan Glinsek; Emmanuel Defay
- Web page: https://patentgrep.com/patent/US11299646B2

## CPC

- C09D 11/52: Electrically conductive inks
- B41J 2/17503: {Ink cartridges}
- B41M 5/0023: {Digital printing methods characterised by the inks used (inks per se C09D11/00)}
- B81C 1/00206: {Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties}
- B81C 1/00373: {Selective deposition, e.g. printing or microcontact printing}
- B82Y 40/00: Manufacture or treatment of nanostructures
- C09D 11/322: Pigment inks
- C09D 11/38: characterised by non-macromolecular additives other than solvents, pigments or dyes
- H10N 30/078: by sol-gel deposition
- B81C 2201/0185: Printing, e.g. microcontact printing
- C09D: COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR (cosmetics A61K; processes for applying liquids or other fluent materials to surfaces, in general, B05D; staining wood B27K5/02; glazes or vitreous enamels C03C; natural resins, French polish, drying-oils, driers, turpentine, per se, C09F; polishing compositions other than French polish, ski waxes C09G; adhesives or use of materials as adhesives C09J; materials for sealing or packing joints or covers C09K3/10; materials for stopping leaks C09K3/12; processes for the electrolytic or electrophoretic production of coatings C25D)
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41M: PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING, (correction of typographical errors B41J; processes for applying transfer pictures or the like B44C1/16; fluid media for correction of typographical errors by coating C09D10/00; printing textiles D06P)
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

## Abstract

An inkjet-printing-base process for depositing functional materials, for example PZT, on a substrate, in various instances platinized silicon. Substrate templating (via SAMs) and material deposition are both performed by an inkjet printing process. Additionally, a composition to be used as a SAM precursor ink which is a thiol in a solvent mixture, wherein the composition can be 1 dodecanethiol in a solvent mixture of 2-methoxyethanol and glycerol.

## Claims

### Claim 1

An Inkjet printing process of printing a functional material on a substrate, said process comprising:
(a) depositing a self-assembled monolayer (SAM) template having a particular pattern on the substrate via inkjet printing, wherein the inkjet-printed SAM template pattern defines boundaries for the deposition of a functional material; and
(b) depositing the functional material within the boundaries of the inkjet-printed SAM template pattern, the functional material being a composition containing PZT (Pb(Zr,Ti)O3), PLZT ((Pb,La)(Zr,Ti)O3), PbTiO3, PbZrO3, Pb(Mg,Nb,Ti)O3, BaTiO3, or (Ba,Ca)(Ti,Zr)O3 in a solvent consisting in 2-methoxyethanol, glycerol and ethylene glycol.

### Claim 2 (depends on 1)

The printing process according to claim 1, wherein depositing a SAM template via inkjet printing comprises inkjet printing a SAM ink that is a composition made of a thiol in a solvent mixture of alcohols and ethers, and the substrate is made of a high surface energy material containing at least a noble metal of the group Pt, Au, Cu, Ir, Pd, Ru.

### Claim 3 (depends on 2)

The printing process according to claim 2, wherein the thiol is 1-dodecanethiol and the solvent mixture of alcohols and ethers is 2-methoxyethanol and glycerol.

### Claim 4 (depends on 3)

The printing process according to claim 3, wherein the solvent mixture of alcohols and ethers is made of 60 to 90 vol % of 2-methoxyethanol, and the remaining vol % is glycerol.

### Claim 5 (depends on 4)

The printing process according to claim 4, wherein the vol % of 2-methoxyethanol is about 75%.

### Claim 6 (depends on 3)

The printing process according to claim 3, wherein the quantity of thiol in the solvent mixture of alcohols and ethers is of 0.1 to 0.00001 M.

### Claim 7 (depends on 6)

The printing process according to claim 6, wherein the quantity of thiol in the solvent mixture of alcohols and ethers is of about 0.001 M.

### Claim 8 (depends on 1)

The printing process according to claim 1, wherein the composition containing PZT consists in PZT diluted to 0.2 M in the solvent, which is made of 65 (±5) vol % 2-methoxyethanol, 25 (±5) vol % glycerol and 10 (±5) vol % ethylene glycol.

### Claim 9 (depends on 1)

The printing process according to claim 1, further comprising the following steps, in that order:
(c) drying;
(d) pyrolysis;
(e) crystallization.

### Claim 10 (depends on 9)

The printing process according to claim 9, wherein the steps (a) to (d) are repeated one time or more, thus defining a cycle, and step (e) is performed after step (d) every n cycle, n being equal or greater than 1, such that a multi-layer functional material is printed on the substrate.

### Claim 11 (depends on 1)

The printing process of claim 1 further comprising utilizing the process to make a microsystem.
