# US 11,299,393 B2 · On-chip signal path with electrical and physical connection > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,299,393 B2 - Document ID: US11299393B2 - Status: Granted - Kind: B2 - Application number: 16/717,660 - Filed: 2019-12-17 - Published: 2021-06-17 - Granted: 2022-04-12 - Earliest claimed: 2019-12-17 - Assignees: InvenSense, Inc. - Applicants: Invensense, Inc. - Inventors: Peter George Hartwell - Web page: https://patentgrep.com/patent/US11299393B2 ## CPC - B81B 7/007: {Interconnections between the MEMS and external electrical signals} - B81B 2207/098: Arrangements not provided for in groups B81B2207/092 - B81B2207/097 - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract An exemplary microelectromechanical system (MEMS) device comprises a plurality of stacked layers, including at least one layer that includes micromechanical components that respond to a force to be measured. Two of the layers may include respective first and second external electrical connection points. A plurality of conductive paths may be disposed in a continuous manner over an external surface of each of the plurality of layers between the first and second external electrical connection points. ## Claims ### Claim 1 A microelectromechanical (MEMS) device, comprising: a first layer; a second layer; a third layer coupled between the first layer and the second layer, wherein the third layer comprises one or more MEMS components; a first plurality of electrical connection points located at an external surface of the first layer; a second plurality of electrical connection points located at an external surface of the second layer; and a plurality of conductive paths, wherein each conductive path provides a continuous portion of material between one of the first plurality of electrical connection points and one of the second plurality of connection points, wherein each conductive path is disposed over the external surface of the first layer, the external surface of the second layer, and an external surface of the third layer, wherein a non-conductive layer is disposed between each of the plurality of conductive paths and the first layer, the second layer, and the third layer, and wherein the non-conductive layer comprises a photoresist layer. ### Claim 2 (depends on 1) The MEMS device of claim 1, wherein the external surface of the first layer comprises a shelf that extends beyond the second layer and the third layer in a first direction, and wherein the first plurality of electrical connection points are located at the shelf. ### Claim 3 (depends on 2) The MEMS device of claim 2, wherein a surface of the shelf including the conductive material is parallel to the second external surface. ### Claim 4 (depends on 3) The MEMS device of claim 3, wherein the surface of the shelf including the conductive material and the second external surface are perpendicular to the third external surface. ### Claim 5 (depends on 1) The MEMS device of claim 1, wherein the second plurality of electrical connection points comprise a plurality of solder couplings. ### Claim 6 (depends on 5) The MEMS device of claim 5, wherein the second external surface is perpendicular to the third external surface. ### Claim 7 (depends on 5) The MEMS device of claim 5, further comprising one or more external components coupled to the plurality of solder couplings. ### Claim 8 (depends on 7) The MEMS device of claim 7, wherein the plurality of solder couplings electrically connect the first plurality of electrical connections to the one or more external components. ### Claim 9 (depends on 8) The MEMS device of claim 8, wherein the first plurality of electrical connections are not electrically connected to any external components other than the one or more external components electrically connected via the plurality of solder couplings. ### Claim 10 (depends on 7) The MEMS device of claim 7, wherein the first layer and third layer are not physically attached to any external components except via the second layer and the solder couplings. ### Claim 11 (depends on 10) The MEMS device of claim 10, wherein the second layer is not connected to any external components except via the solder couplings. ### Claim 12 (depends on 1) The MEMS device of claim 1, wherein the continuous portion of material comprises Copper (Cu), Gold (Au), Nickel (Ni), Cobalt (Co), Tin (Sn), or Aluminum (Al). ### Claim 13 (depends on 12) The MEMS device of claim 12, wherein the thickness of the continuous portion of material comprises 1-10 microns. ### Claim 14 A microelectromechanical (MEMS) device, comprising: a plurality of layers, wherein at least one of the plurality of layers comprises one or more MEMS components; a first plurality of electrical connection points located at a first planar external surface of a first layer of the plurality of layers; a second plurality of electrical connection points located at a second planar external surface of a second layer of the plurality of layers; and a plurality of conductive paths over the first planar external surface and the second planar external surface, wherein each conductive path provides a continuous portion of material between one of the first plurality of electrical connection points and one of the second plurality of connection points, wherein each of the plurality of conductive paths extends along a third planar external planar surface of one or more of the plurality of layers that is located between the first planar external surface and the second planar external surface, wherein a non-conductive layer is disposed between each of the plurality of conductive paths and the plurality of layers, and wherein the non-conductive layer comprises a photoresist layer. ### Claim 15 (depends on 14) The MEMS device of claim 14, wherein the first planar external surface is parallel to the second planar external surface and wherein the third planar external surface extends between and connects the first planar external surface to the second planar external surface. ### Claim 16 (depends on 15) The MEMS device of claim 15, wherein the third planar external surface is perpendicular to the first planar external surface and the second planar external surface. ### Claim 17 A method for operating a microelectromechanical (MEMS) device in an end-use device, comprising: receiving, at a first subset of a first plurality of electrical connection points, a plurality of signals from the MEMS device, wherein the MEMS device comprises a plurality of layers, wherein at least one of the plurality of layers comprises one or more MEMS components, and wherein the first plurality of electrical connection points are located at a first planar external surface of a first layer of the plurality of layers; providing, via a first subset of a plurality of conductive paths, the plurality of signals from the MEMS device to a first subset of a second plurality of electrical connection points, wherein each conductive path provides a continuous portion of material between one of the first plurality of electrical connection points and one of the second plurality of connection points, wherein a non-conductive layer is disposed between each of the first subset of the plurality of conductive paths and the plurality of layers, and wherein the non-conductive layer comprises a photoresist layer; receiving, at a second subset of the second plurality of electrical connection points, a plurality of signals from the end-use device, wherein the second plurality of electrical connection points are located at a second planar external surface of a second layer of the plurality of layers; and providing, via a second subset of the plurality of conductive paths, the plurality of electrical signals from the end-use device to a second subset of the first plurality of electrical connection points, wherein, for each of the conductive paths, the continuous portion of material includes a right angle between a respective first electrical connection point and a respective second electrical connection point, wherein a non-conductive layer is disposed between each of the second subset of the plurality of conductive paths and the plurality of layers, and wherein the non-conductive layer comprises a photoresist-layer. ### Claim 18 (depends on 17) The method of claim 17, wherein the plurality of electrical signals from the MEMS device comprise one or more signals corresponding to a force measured by the MEMS device, and wherein the plurality signals from the end-use device comprise power, ground, and data signals.