Method for removing foreign matter and method for manufacturing optical detection device

A method for manufacturing a light detection device including a package having a cap formed with an opening through which light is incident and having a stem joined to the cap, a Fabry-Perot interference filter disposed in the package, and a light detector arranged in the package so as to detect the light transmitted through the Fabry-Perot interference filter,

• wherein the Fabry-Perot interference filter includes a substrate having a first surface and a second surface opposite to the first surface, a first laminate having a first mirror portion arranged on the first surface, and a second laminate having a second mirror portion arranged on the first mirror portion, in which a gap is formed between a portion of the first laminate at least including the first mirror portion and a portion of the second laminate at least including the second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force,
• the manufacturing method comprising:
• a step of preparing the stem to which the Fabry-Perot interference filter and the light detector are secured;
• a step of detecting a foreign substance adhering to a surface of the second laminate opposite to the first laminate of the Fabry-Perot interference filter secured to the stem;
• a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate;
• and
• a step of joining the cap to the stem after the step of removing the foreign substance.

A method for manufacturing a light detection device including a package having a lid substrate and a support body joined to the lid substrate, a Fabry-Perot interference filter disposed inside the package, and a light detector disposed in the package so as to detect light transmitted through the Fabry-Perot interference filter,

• wherein the Fabry-Perot interference filter includes a substrate having a first surface and a second surface opposite to the first surface, a first laminate having a first mirror portion arranged on the first surface, and a second laminate having a second mirror portion arranged on the first mirror portion, in which a gap is formed between a portion of the first laminate at least including the first mirror portion and a portion of the second laminate at least including the second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force,
• the manufacturing method comprising:
• a step of preparing a plurality of Fabry-Perot interference filters arranged one-dimensionally or two-dimensionally, a plurality of light detectors provided corresponding to the plurality of Fabry-Perot interference filters, and a support layer that supports the plurality of Fabry-Perot interference filters and the plurality of light detectors and that is to be cut into a plurality of support bodies;
• a step of detecting a foreign substance adhering to a surface of the second laminate opposite to the first laminate for each of the plurality of Fabry-Perot interference filters;
• a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate;
• a step of joining a lid substrate layer that is to be cut into a plurality of lid substrates to the support layer after the step of removing the foreign substance and thereby obtaining a plurality of light detection devices one-dimensionally or two-dimensionally linked to each other;
• and
• a step of cutting a portion at which the lid substrate layer and the support layer are joined and thereby obtaining each of the light detection devices.