Thermal convection based accelerometer and heating control method therefor
AssigneeMEMSIC Semiconductor (TIANJIN) Co., Ltd.
InventorsHongzhi Sun, Alexander Dribinsky
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AssigneeMEMSIC Semiconductor (TIANJIN) Co., Ltd.
InventorsHongzhi Sun, Alexander Dribinsky
Estimating the term…
Thermal convection based accelerometers and heating control methods therefor are described. The heating control method includes: sensing a temperature in the enclosed cavity and generating a temperature voltage signal; amplifying the temperature voltage signal to obtain an amplified temperature voltage signal; calculating a voltage difference between the amplified temperature voltage signal and a reference voltage signal; converting the voltage difference into a digital sequence by using a modulator; obtaining a heating power adjustment factor representing the voltage difference based on the digital sequence; obtaining a heating power control parameter based on the heating power adjustment factor and an initial heating power factor; converting the heating power control parameter into a switch control signal; and turning on or off a heating control switch coupling with a heating resistor for heating the enclosed cavity in series according to the switch control signal.
A thermal convection based accelerometer, comprising:
A heating control method for a thermal convection based accelerometer, comprising a body having an enclosed cavity and a heating control circuit configured for controllably heating the enclosed cavity, and the heating control method comprising:
Dependencies are inferred from the claim text.