Method for vapor depositing a substrate
AssigneesBeijing Boe Display Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsJiyu Wan, Dong Wang, Yongzhi Song, Jingjing Jiang, Pengyu Qi
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Abstract
The present disclosure relates to the field of vapor deposition technologies, and discloses a vapor deposition method. The vapor deposition method includes: applying an exciting acoustic wave to the target, such that particles in a predetermined location of the target break away from the target and adhere to a predetermined region of the substrate when an energy of the particles is higher than an energy required for the particles to break away from the target. By using the vapor deposition method, losses of vapor deposition materials may be avoided, utilization of the vapor deposition materials may be increased, and thus costs may be reduced.
Claims4
A vapor deposition method comprising:
- providing a target;
- providing a substrate, the substrate configured to receive particles from the target;
- and
- applying an exciting acoustic wave to the target, such that the particles in a predetermined location of the target break away from the target and adhere to a predetermined region of the substrate when an energy of the particles is higher than an energy required for the particles to break away from the target,
- wherein the exciting acoustic wave is a rectangular standing wave, and the rectangular standing wave is synthesized using a plurality of sine waves or a plurality of cosine waves,
- wherein synthesizing the rectangular standing wave comprises:
- partitioning the target into a plurality of periodic units according to a vapor deposition requirement of the substrate, a function of the rectangular standing wave being expressed as:
- f
-
- (
- x
- )
- =
- a
- 0
- 2
- +
- ∑
- 1
- ∞
-
- a
- n
-
- cos
-
- (
- nx
- L
- )
- ,
- wherein a0 represents an amplitude of the rectangular standing wave, an represents an amplitude of the sine wave or an amplitude of the cosine wave, n represents a number of the sine waves or a number of the cosine waves, and L represents a width of the periodic unit.
Dependencies are inferred from the claim text.