Mixer and vaporization apparatus
AssigneeHORIBA STEC, Co., Ltd.
InventorsMasanori Terasaka, Hidenori Oba
Life of this patent
Estimating the term…
Loading patent…
AssigneeHORIBA STEC, Co., Ltd.
InventorsMasanori Terasaka, Hidenori Oba
Estimating the term…
A mixer is adapted to include: a flow path forming member formed with an internal flow path; and an insertion member inserted into the internal flow path, in which: the inner circumferential surface forming the internal flow path in the flow path forming member or the outer circumferential surface of the insertion member is formed with a first groove and a second groove merging with the first groove and branching from the first groove, and the inner circumferential surface and the outer circumferential surface are fitted to each other; and the first groove and the second groove are formed as a mixing flow path for, between the flow path forming member and the insertion member, branching and merging fluid flowing from one side of the internal flow path and guiding the fluid to the other side of the internal flow path.
A vaporization apparatus that vaporizes fluid to produce vaporized gas, the vaporization apparatus comprising:
Dependencies are inferred from the claim text.