Electrode component for generating large area atmospheric pressure plasma
AssigneeMing Chi University of Technology
InventorsJang-Hsing Hsieh, Shu-Chien Chang, Shi-Wei Huang
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AssigneeMing Chi University of Technology
InventorsJang-Hsing Hsieh, Shu-Chien Chang, Shi-Wei Huang
Estimating the term…
An electrode component for generating large area atmosphere pressure plasma is provided. The electrode component comprises a first transparent insulation substrate, a first transparent electrode pattern, a second transparent electrode pattern, and a second transparent insulation substrate. The first transparent insulation substrate has a first thickness. The first transparent electrode pattern and the second transparent electrode pattern are formed on the upper surface of the first transparent insulation substrate and has a gap therebetween. The second transparent insulation substrate has a second thickness and covers the first transparent electrode pattern and the second transparent electrode pattern. The first thickness is greater than the second thickness in order to form atmospheric pressure plasma above the second transparent insulation substrate.
An electrode component for generating large area atmospheric pressure plasma comprising:
Dependencies are inferred from the claim text.