US 11,289,876 B2 · Mid-infrared vertical cavity laser

Abstract

Disclosed is an optically pumped vertical cavity laser structure operating in the mid-infrared region, which has demonstrated room-temperature continuous wave operation. This structure uses a periodic gain active region with type I quantum wells comprised of InGaAsSb, and barrier/cladding regions which provide strong hole confinement and substantial pump absorption. A preferred embodiment includes at least one wafer bonded GaAs-based mirror. Several preferred embodiments also include means for wavelength tuning of mid-IR VCLs as disclosed, including a MEMS-tuning element. This document also includes systems for optical spectroscopy using the VCL as disclosed, including systems for detection concentrations of industrial and environmentally important gases.

Claims3

Dependent claims

A vertical cavity laser (VCL) optically pumped with a pump source at a pump wavelength and providing VCL emission at an emission wavelength, said VCL comprising:

a first mirror,
a second mirror, and
a periodic gain active region,
wherein said periodic gain active region comprises at least two type I quantum wells containing Indium, Arsenic, and Antimony, said active region further comprising a GaSb barrier region adjacent to said type I quantum wells,
wherein said active region further comprises a barrier region adjacent to said type I quantum wells which is absorbing at said pump wavelength, and a hole-blocking cladding region adjacent to said barrier region, which is substantially transparent at said pump wavelength;
wherein said emission wavelength is in a range of about 3-5 um;
and
wherein at least one of said first and second mirrors is a wafer-bonded mirror joined to said periodic gain active region at a wafer bonded interface, and comprises Al(x)Ga(1-x)As, with 0≤x≤1, wherein said Al(x)Ga(1−x)As is grown on a GaAs substrate.

5 more elements

Dependencies are inferred from the claim text.

Mid-infrared vertical cavity laser

Life of this patent

Mid-infrared vertical cavity laser

Life of this patent

Abstract

Claims3