Moisture and hydrogen adsorption getter and method of fabricating the same
AssigneeIndustry-University Cooperation Foundation Hanyang University Erica Campus
InventorsYongho Choa, Nusia Eom, Hyoryoung Lim
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Abstract
A moisture and hydrogen adsorption getter is provided. The moisture and hydrogen adsorption getter includes a silicon substrate including a concave portion and a convex portion, a silicon oxide layer conformally provided along a surface of the concave portion and a surface of the convex portion and configured to adsorb moisture, and a hydrogen adsorption pattern disposed on the silicon oxide layer. A portion of the silicon oxide layer is exposed between portions of the hydrogen adsorption pattern.
Claims7
A method of fabricating a moisture and hydrogen adsorption getter, the method comprising:
- preparing a silicon substrate including a concave portion and a convex portion;
- forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion, wherein a plurality of metal particles is provided in the plurality of holes,
- forming a silicon oxide layer for adsorbing moisture;
- and
- forming a hydrogen adsorption pattern on the silicon oxide layer.
A method of fabricating a moisture and hydrogen adsorption getter, the method comprising:
- preparing a silicon substrate including a concave portion and a convex portion;
- forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion, wherein a plurality of metal particles is provided in the plurality of holes,
- forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution;
- and
- forming a hydrogen adsorption pattern on the silicon oxide layer.
A method of fabricating a moisture and hydrogen adsorption getter, the method comprising:
- preparing a silicon substrate including a concave portion and a convex portion;
- forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution;
- and
- forming a hydrogen adsorption pattern on the silicon oxide layer,
- forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion before the forming of the silicon oxide layer,
- wherein the forming of the holes comprises:
- forming a metal thin layer on the concave portion and the convex portion;
- thermally treating the metal thin layer formed on the concave portion and the convex portion to form metal particles;
- and
- forming the holes extending downward from the surfaces corresponding to the metal particles by a method of etching the silicon substrate including the concave portion and the convex portion by using the metal particles as a catalyst.
A method of fabricating a moisture and hydrogen adsorption getter, the method comprising:
- preparing a silicon substrate including a concave portion and a convex portion;
- forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution;
- forming a hydrogen adsorption pattern on the silicon oxide layer;
- and
- forming passivation metal catalyst particles on the hydrogen adsorption pattern,
- wherein the forming of the passivation metal catalyst particles comprises:
- forming a metal catalyst pattern on the hydrogen adsorption pattern;
- and
- thermally treating the metal catalyst pattern to form the passivation metal catalyst particles.
Dependencies are inferred from the claim text.