Surface-emitting laser and method for manufacturing surface-emitting laser

A surface emitting laser made of a group-III nitride semiconductor comprising:

• a first cladding layer of a first conductive type formed on a substrate;
• a first optical guide layer of said first conductive type formed on said first cladding layer, the first optical guide layer having cavities therein which are arranged to have a two-dimensional periodicity in a plane parallel to said first optical guide layer, wherein a photonic crystal layer is formed inside said first optical guide layer;
• an active layer formed on said first optical guide layer;
• a second optical guide layer of a second conductive type formed on said active layer, the second conductive type being an opposite conductive type to said first conductive type;
• and
• a second cladding layer of said second conductive type formed on said second optical guide layer,
• wherein a surface of said first optical guide layer in contact with the active layer is a (0001) plane, and a plane of said cavities on a side of said active layer is a (000-1) plane;
• and
• wherein a filling factor of said photonic crystal layer is 5% or more.

A surface emitting laser made of a group-III nitride semiconductor comprising:

• a first cladding layer of a first conductive type formed on a substrate;
• a first optical guide layer of said first conductive type formed on said first cladding layer, the first optical guide layer having cavities therein which are arranged to have a two-dimensional periodicity in a plane parallel to said first optical guide layer;
• an active layer formed on said first optical guide layer;
• a second optical guide layer of a second conductive type formed on said active layer, the second conductive type being an opposite conductive type to said first conductive type;
• and
• a second cladding layer of said second conductive type formed on said second optical guide layer,
• wherein at least one of side surfaces of said cavities is a {10-10} facet, and
• wherein said first optical guide layer includes a first portion which have recesses respectively formed above each of said cavities, wherein each of said recesses have at least one facet of a predetermined plane direction, and
• wherein said first optical guide layer further includes a second portion which planarizes an upper surface of said first optical guide layer by filling said recesses.