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US 11,283,049 B2Granted
Barrier film and an electronic device comprising the same
AssigneeLG Chem, Ltd.
InventorsJang Yeon Hwang, Dong Ryul Kim, Seoung Lac Ma
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Abstract
A barrier film including a first layer formed of a semicovalent inorganic material and a second layer formed of an ionic inorganic material is provided. Here, the first layer and the second layer are alternately disposed. The barrier film having an improved moisture barrier property compared to a gas-barrier plastic composite film of the prior art manufactured using only a metal oxide or nitride may be provided.
Claims11
A barrier film comprising:
- a stacked sheet having a top surface and a bottom surface and comprising:
- at least two first layers formed of a semicovalent inorganic material;
- and
- at least one second layer formed of an ionic inorganic material,
- wherein:
- each second layer is disposed between two first layers with one first layer in contact with a first surface of the second layer and the other first layer in contact with an opposite second surface of the second layer,
- each first layer and second layer are alternately disposed,
- the first layers are disposed to form both the top and bottom surfaces of the stacked sheet,
- the semicovalent inorganic material comprises a metal oxide, a nitride of the corresponding metal or a mixture thereof, all of which have a binding energy of 530.5 eV to 533.5 eV,
- the ionic inorganic material comprises a metal oxide, a nitride of the corresponding metal or a mixture thereof, all of which have a binding energy of 529.6 eV to 530.4 eV,
- the difference in binding energy between the semicovalent inorganic material and the ionic inorganic material is in the range of 0.1 eV to 3.9 eV, and
- the ionic inorganic material is an oxide, a nitride or a nitride oxide including at least one metal selected from the group consisting of calcium, zinc, zirconium, indium and cerium.
9 more elements
Dependencies are inferred from the claim text.