Concentration measurement method and concentration measurement device
AssigneeHamamatsu Photonics K.K.
InventorTomonori Nakamura
Life of this patent
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Abstract
A concentration measurement method for measuring a concentration of impurities includes a step of irradiating a DUT 10 serving as a measurement target object with measurement light and stimulus light subjected to intensity modulation using a modulation signal including a default frequency, a step of outputting a detection signal by detecting an intensity of reflected light from the DUT 10 or transmitted light through the DUT 10, and a step of detecting a phase delay of the detection signal with respect to the modulation signal, obtaining a frequency at which the phase delay has a predetermined value, and estimating a concentration of impurities in the measurement target object on the basis of the frequency.
Claims16
A concentration measurement method for measuring a concentration of impurities in a measurement target object, the concentration measurement method comprising:
- irradiating the measurement target object with measurement light and stimulus light subjected to intensity modulation using a modulation signal including a default frequency;
- outputting a detection signal by detecting an intensity of reflected light from the measurement target object or transmitted light through the measurement target object;
- and
- detecting a phase delay of the detection signal with respect to the modulation signal, obtaining a frequency at which the phase delay has a predetermined value, and estimating a concentration of impurities in the measurement target object on the basis of a time constant corresponding to a lifetime of carriers in the measurement target object, calculated from the obtained frequency.
A concentration measurement device for measuring a concentration of impurities in a measurement target object, the concentration measurement device comprising:
- a first light source configured to generate measurement light;
- a second light source configured to generate stimulus light;
- a modulator configured to perform intensity modulation of the stimulus light using a modulation signal including a default frequency;
- a photo detector configured to output a detection signal by detecting an intensity of reflected light from the measurement target object or transmitted light through the measurement target object;
- an optical system configured to guide the measurement light and the stimulus light subjected to intensity modulation toward the measurement target object and to guide reflected light from the measurement target object or transmitted light through the measurement target object toward the photo detector;
- and
- an analyzer configured to detect a phase delay of the detection signal with respect to the modulation signal, to obtain a frequency at which the phase delay has a predetermined value, and to estimate a concentration of impurities in the measurement target object on the basis of a time constant corresponding to a lifetime of carriers in the measurement target object, calculated from the obtained frequency.
Dependencies are inferred from the claim text.