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US 11,279,661 B2Granted
Heat treated ceramic substrate having ceramic coating
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky
Life of this patent
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Abstract
A heat treated ceramic article includes a ceramic substrate and a ceramic coating on the ceramic substrate. The ceramic coating is a non-sintered ceramic coating that has a different composition than the ceramic substrate. The heat treated ceramic article further includes a transition layer between the ceramic substrate and the ceramic coating, the transition layer comprising first elements from the ceramic coating that have reacted with second elements from the ceramic substrate, wherein the transition layer has a thickness of about 0.1 microns to about 5 microns.
Claims15
A ceramic article comprising a ceramic substrate and a ceramic coating on the ceramic substrate, wherein the ceramic substrate comprises Al2O3 and the ceramic coating comprises Y4Al2O9 and a solid solution of Y2O3—ZrO2, the ceramic article having been prepared by a process comprising:
- performing a thermal spraying process to form the ceramic coating on the ceramic substrate, the ceramic coating having an initial porosity and an initial amount of cracking;
- heating the ceramic article to a temperature range between about 1000° C. and about 1800° C.;
- performing heat treatment of the ceramic article at one or more temperatures within the temperature range for a duration to reduce a porosity of the ceramic coating to below the initial porosity and to reduce an amount of cracking of the ceramic coating to below the initial amount of cracking, wherein the ceramic article is heat treated at below a sintering temperature for the ceramic coating to prevent sintering of the ceramic coating, wherein the heat treatment causes the ceramic coating to react with the ceramic substrate to form a transition layer between the ceramic substrate and the ceramic coating, and wherein the duration and the temperature range cause the transition layer to have a thickness of about 1 micron to about 5 microns, wherein the transition layer comprises Y3Al5O12;
- and
- cooling the ceramic article after the heat treatment, wherein after the heat treatment the ceramic coating is not sintered, has a reduced amount of cracking that is below the initial amount of cracking, and has a reduced porosity that is below the initial porosity.
2 more elements
A method comprising:
- performing a thermal spraying process to form a ceramic coating on a ceramic article, wherein the ceramic article comprises Al2O3 and the ceramic coating comprises Y4Al2O9 and a solid solution of Y2O3—ZrO2, wherein the ceramic coating has an initial porosity and an initial amount of cracking;
- heating the ceramic coating to a temperature range between about 1000° C. and about 1800° C.;
- heat treating the ceramic coating at one or more temperatures within the temperature range for a duration to reduce a porosity and an amount of cracking of the ceramic coating, wherein the ceramic coating is heat treated at below a sintering temperature for the ceramic coating to prevent sintering of the ceramic coating, and wherein the heat treating causes the ceramic coating to react with the ceramic article to form a transition layer between the ceramic article and the ceramic coating, wherein the duration and the temperature range cause the transition layer to have a thickness of about 1 micron to about 5 microns, wherein the transition layer comprises Y3Al5O12;
- and
- cooling the ceramic coating after the heat treating, wherein after the heat treating the ceramic coating is not sintered, has a reduced amount of cracking that is below the initial amount of cracking, and has a reduced porosity that is below the initial porosity.
2 more elements
A method comprising:
- receiving a heat treated ceramic article, wherein the heat treated ceramic article comprises a thermal sprayed ceramic coating, wherein the ceramic coating has been used in a plasma etch process, wherein the ceramic article comprises Al2O3 and the ceramic coating comprises Y4Al2O9 and a solid solution of Y2O3—ZrO2, and wherein the ceramic coating has an initial density of surface defects caused by the plasma etch process, the surface detects comprising an initial porosity and an initial amount of cracking;
- heating the ceramic article to a temperature range between about 1000° C. and about 1800° C. at a ramping rate of about 0.1° C. per minute to about 20° C. per minute;
- heat treating the ceramic article at one or more temperatures within the temperature range for a duration of up to about 24 hours to reduce the surface defect density caused by the plasma etch process, wherein the heat treating is at a temperature below a sintering temperature for the ceramic coating to prevent sintering of the ceramic coating, wherein the heat treating causes the ceramic coating to react with the ceramic substrate to form a transition layer between the ceramic substrate and the ceramic coating, and wherein the duration and the temperature range cause the transition layer to have a thickness of about 1 microns to about 5 microns, wherein the transition layer comprises Y3Al5O12;
- and
- cooling the ceramic article at the ramping rate after the heat treating, wherein after completing the heat treating the heat treated ceramic article has a new surface defect density level below the surface defect density level caused by the plasma etch process.
2 more elements
Dependencies are inferred from the claim text.