Using graphics processing unit for substrate routing and throughput modeling
AssigneeApplied Materials, Inc.
InventorShyam Sunder Emani
Life of this patent
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Abstract
A method includes receiving a matrix including start times associated with substrate operations in a substrate processing system. The method further includes generating, by a first graphics processing unit (GPU) of one or more GPUs, a plurality of matrices based on the matrix. The method further includes concurrently processing, by a plurality of cores of the one or more GPUs, the plurality of matrices to generate parallel outputs. A schedule for processing substrates in the substrate processing system is to be generated based on the parallel outputs.
Claims20
A method comprising:
- receiving a matrix comprising a plurality of start times associated with substrate operations in a substrate processing system;
- generating, by a first graphics processing unit (GPU) of one or more GPUs, a plurality of matrices based on the matrix;
- and
- concurrently processing, by a plurality of cores of the one or more GPUs, the plurality of matrices to generate parallel outputs, wherein a schedule is to be generated based on the parallel outputs, and wherein substrates are processed by the substrate processing system based on the schedule.
A system comprising:
- a memory;
- and
- a graphics processing units (GPU), coupled to the memory, wherein the GPU is to:
- receive a matrix comprising a plurality of start times associated with substrate operations in a substrate processing system;
- generate a plurality of matrices based on the matrix;
- and
- concurrently process, by a plurality of cores of the GPU, the plurality of matrices to generate parallel outputs, wherein a schedule is to be generated based on the parallel outputs, and wherein substrates are processed by the substrate processing system based on the schedule.
A non-transitory computer readable medium having instructions stored thereon, which, when executed by a graphics processing unit (GPU), cause the GPU perform operations comprising:
- receiving a matrix comprising a plurality of start times associated with substrate operations in a substrate processing system;
- generating a plurality of matrices based on the matrix;
- and
- concurrently processing, by a plurality of cores of the GPU, the plurality of matrices to generate parallel outputs, wherein a schedule is to be generated based on the parallel outputs, and wherein substrates are processed by the substrate processing system based on the schedule.
Dependencies are inferred from the claim text.