Vibrating barrel polishing method and vibrating barrel polishing system

A vibration barrel polishing system comprising:

• a polishing tank having a bottom surface;
• a rotating shaft configured to rotate about an axis to vibrate the polishing tank;
• a polishing jig configured to hold a workpiece;
• a positioning unit configured to support the polishing jig in the polishing tank, the positioning unit being capable of changing a position of the polishing jig in a height direction;
• a rotating unit configured to rotate the polishing jig around a rotation axis;
• and
• a controller configured to control the rotating shaft, the positioning unit and the rotating unit,
• wherein the controller is configured to:
• control the positioning unit so that the polishing jig is disposed at a position where a lowermost portion of the polishing jig is separated from the bottom surface by a clearance d;
• rotate the rotating shaft so that a polishing medium flows in the polishing tank by vibration of the polishing tank;
• and
• control the rotating unit to rotate the polishing jig in a state in which a lowermost portion of the polishing jig is separated from the bottom surface by the clearance d and an uppermost portion of the polishing jig is disposed above a surface of the polishing medium, and
• wherein the clearance d is equal to or greater than a grain diameter of the polishing medium and equal to or smaller than (H1+H2)/4, wherein H1 represents a maximum height of the surface of the polishing medium flowing in the polishing tank with respect to the bottom surface and H2 represents a minimum height thereof in a cross-sectional view along a plane orthogonal to the rotation axis and passing through a center of the bottom surface.