Processing equipment component plating
AssigneeApplied Materials, Inc.
InventorsRen-Guan Duan, Juan Carlos Rocha-Alvarez, Bushra Afzal
Life of this patent
Estimating the term…
Loading patent…
AssigneeApplied Materials, Inc.
InventorsRen-Guan Duan, Juan Carlos Rocha-Alvarez, Bushra Afzal
Estimating the term…
A method of forming a radio frequency (RF) strap for use in a process chamber is provided. The method includes positioning a core strap including a first material that is electrically and thermally conductive in a first electrochemical bath. The first electrochemical bath includes a first solvent and a first plating precursor. The method further includes forming a first protective coating on an outer surface of the core strap, removing the first solvent and the first plating precursor from the core strap having the first protective coating formed thereon, post-treating the core strap having the first protective coating formed thereon, positioning the core strap having the first protective coating formed thereon in a second electrochemical bath, and forming a second protective coating on an outer surface of the first protective coating. The first protective coating includes nickel, the second electrochemical bath includes a second solvent and a second plating precursor, and the second protective coating includes gold.
A method of forming a radio frequency (RF) strap for use in a process chamber, comprising:
Dependencies are inferred from the claim text.