Method for forming pattern using antireflective coating composition including photoacid generator

A coated substrate, comprising (a) a substrate;

• and (b) a layer of a antireflective coating composition disposed over the substrate,
• wherein the antireflective coating composition comprises:
• a polymer, wherein the polymer comprises a cyanurate structural unit,
• a photoacid generator comprising a crosslinkable group,
• a compound capable of crosslinking the polymer and the photoacid generator,
• a thermal acid generator, and
• an organic solvent,
• wherein the photoacid generator is an onium salt having formula G+A− wherein G+ has Formula 1 and A−is a non-polymerizable organic anion:
• wherein, in Formula 1,
• Y is I or S,
• each R1 is independently a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C6-30 aryl group, wherein when Y is S, one of the R1 is optionally attached to one adjacent R1 by a single bond or a linking group,
• provided that at least one R1 is a monocyclic C6-30 aryl group bearing a hydroxyl group attached thereto through a single bond or an unsubstituted or substituted C1-C30 linking group optionally including at least one heteroatom selected from O, S, N, and P, and
• z is 2 or 3, wherein when Y is I, z is 2, or when Y is S, z is 3.

A method of forming a pattern, comprising:

• (a) applying a layer of the antireflective coating composition over a substrate;
• (b) curing the applied antireflective coating composition to form an antireflective layer;
• (c) forming a photoresist layer over the antireflective layer;
• and (d) patterning the photoresist layer and transferring the pattern from the patterned photoresist layer to the antireflective layer,
• wherein the antireflective coating composition comprises:
• a polymer, wherein the polymer comprises a cyanurate structural unit,
• a photoacid generator comprising a crosslinkable group,
• a compound capable of crosslinking the polymer and the photoacid generator,
• a thermal acid generator, and
• an organic solvent,
• wherein the photoacid generator is an onium salt having formula G+A− wherein G+ has Formula 1 and A−is a non-polymerizable organic anion:
• wherein, in Formula 1,
• Y is I or S,
• each R1 is independently a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted polycyclic or monocyclic C3-30 cycloalkyl group, a substituted or unsubstituted polycyclic or monocyclic C6-30 aryl group, wherein when Y is S, one of the R1 is optionally attached to one adjacent R1 by a single bond or a linking group,
• provided that at least one R1 is a monocyclic C6-30 aryl group bearing a hydroxyl group attached thereto through a single bond or an unsubstituted or substituted C1-C30 linking group optionally including at least one heteroatom selected from O, S, N, and P, and
• z is 2 or 3, wherein when Y is I, z is 2, or when Y is S, z is 3.