MEMS gravimeter

Abstract

The present invention discloses a MEMS gravimeter comprising: a spring-mass system, a displacement sensing structure, a displacement detecting circuit, a cavity body and a level adjustment base; the spring-mass system is disposed inside the cavity body and includes: a negative-stiffness spring, a positive-stiffness spring, a proof mass and an outer frame; the proof mass is connected to the outer frame by the negative-stiffness spring and the positive-stiffness spring, the negative-stiffness spring and the positive-stiffness spring are symmetrically disposed with respect to the proof mass, and the outer frame is fixedly connected to the cavity body; the displacement sensing structure is located on a surface of the proof mass, and the displacement detecting circuit is configured to detect a displacement signal from the displacement sensing structure; the spring-mass system realizes reduction in resonant frequency by matching of the positive and negative stiffness springs; and change in gravitational acceleration is detected by detecting a displacement of the proof mass. The MEMS gravimeter has high stability, small size and light weight, and thus can effectively reduce the production cost as well as the development difficulty of the signal detection unit and stable platform.

Dependencies are inferred from the claim text.