Pyroelectric detection device with rigid membrane
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsGwenael Le Rhun, Stephane Fanget, Andre Rouzaud
Life of this patent
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Abstract
Pyroelectric detection device, including at least: a substrate; a membrane arranged on the substrate; a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes; a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate; an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane.
Claims20
A pyroelectric detection device, comprising:
- a substrate;
- a membrane arranged on the substrate;
- a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes;
- a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate;
- an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane, wherein the stiffening element is formed by one or more portions of the substrate such that the stiffening element and the substrate are made of a same material,
- in which a ratio between the surface area of the part of the membrane forming the bottom wall of the cavity which is in contact with the stiffening element and the total surface area of the part of the membrane forming the bottom wall of the cavity is comprised between around 0.05 and 0.6.
A method for producing a pyroelectric detection device, comprising:
- producing, on a substrate, a membrane and a pyroelectric detection element such that it is arranged on the membrane or that it forms at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes;
- producing at least one cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate;
- producing at least one element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane,
- wherein the stiffening element is formed by one or more portions of the substrate such that the stiffening element and the substrate are made of a same material, and
- wherein a ratio between the surface area of the part of the membrane forming the bottom wall of the cavity which is in contact with the stiffening element and the total surface area of the part of the membrane forming the bottom wall of the cavity is comprised between around 0.05 and 0.6.
Dependencies are inferred from the claim text.