Optical coherence tomography (OCT) system for producing profilometry measurements of a specimen

An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements, comprising:

• a line-field generator including an extended light source of an angular size greater than the lateral resolution, a lens arranged on a path of light emitted by the extended light source for focusing the light into an extended line-field light of a width greater than the lateral resolution, and a filter arranged in a focal plane of the lens for spatially filtering the extended line-field light into a line-field light of a width equal to the lateral resolution;
• an interferometer configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern;
• and
• a spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.