Apparatus for transferring microdevice and method for transferring microdevice
AssigneeCCS Technology, Inc.
InventorsTung-Po Sung, Chang-Cheng Lo
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Abstract
This invention provides an apparatus for transferring at least one microdevice and a method for transferring at least one microdevice, which is characterized by utilizing the apparatus for transferring at least one microdevice having a magnetic attracting substrate with at least one magnetic attracting head or magnetic attracting position hole to attract at least one microdevice having at least one magnetic layer disposed on a temporary substrate, and transfer the at least one microdevice to the conductive bonding layer of the at least one microdevice bonding region on a target substrate thereafter.
Claims52
An apparatus for transferring at least one microdevice, comprising:
- a first magnet with a first terminal and a second terminal opposite to each other;
- a first magnetic attracting substrate with a first surface and a second surface opposite to each other disposed under the first magnet, wherein the first surface of the first magnetic attracting substrate is directly contacted to the first terminal of the first magnet, and the second surface of the first magnetic attracting substrate comprises at least one microdevice alignment region, and each one of the at least one microdevice alignment region comprises at least one magnetic attracting head protruding out of the second surface;
- and
- an insulating layer enveloping the first magnetic attracting substrate but partially exposing the at least one magnetic attracting head in each of the at least one microdevice alignment region.
An apparatus for transferring at least one microdevice, comprising:
- a first magnet with a first terminal and a second terminal opposite to each other;
- a first magnetic attracting substrate with a first surface and a second surface opposite to each other disposed under the first magnet, wherein the first surface of the first magnetic attracting substrate is directly contacted to the first terminal of the first magnet, and the second surface of the first magnetic attracting substrate comprises at least one microdevice alignment region;
- and
- an insulating layer enveloping the first magnetic attracting substrate, wherein each of the at least one microdevice alignment region comprises at least one magnetic attracting hole exposing the second surface of the first magnetic attracting substrate.
Dependencies are inferred from the claim text.