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US 11,257,654 B2Granted
Ion milling apparatus
AssigneeHitachi High-Tech Corporation
InventorsKengo Asai, Hiroyasu Shichi, Toru Iwaya, Hisayuki Takasu
Life of this patent
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Abstract
To provide an ion milling apparatus adapted to suppress the contamination of a beam forming electrode. The ion milling apparatus includes: an ion gun containing therein a beam forming electrode for forming an ion beam; a specimen holder for fixing a specimen to be processed by irradiation of an ion beam; a mask for shielding a part of the specimen from the ion beam; and an ion gun controller for controlling the ion gun.
Claims11
An ion milling apparatus comprising:
- an ion gun containing therein a beam forming electrode for forming an ion beam;
- a specimen holder for fixing a specimen to be processed by irradiation of the ion beam;
- a mask for shielding a part of the specimen from the ion beam;
- and
- an ion gun controller for controlling the ion gun,
- wherein the ion gun includes:
- an anode disposed inside the ion gun;
- a permanent magnet disposed around the anode via an insulator;
- a cathode ring disposed around the permanent magnet;
- a first cathode and a second cathode disposed at places above and below the anode and connected to the cathode ring;
- and
- an acceleration electrode disposed in a manner to cover the first cathode, the second cathode and the cathode ring and operative to accelerate generated ions for radiating the ions to the outside of the ion gun, and
- the beam forming electrode is disposed between the acceleration electrode and the second cathode disposed on the side of the acceleration electrode.
10 more elements
An ion milling apparatus comprising:
- an ion gun containing therein a beam forming electrode for forming an ion beam;
- a specimen holder for fixing a specimen to be processed by irradiation of the ion beam;
- a mask for shielding a part of the specimen from the ion beam;
- an electron microscope column for radiating an electron beam;
- and
- an ion gun controller for controlling the ion gun,
- wherein the ion gun includes:
- an anode disposed inside the ion gun;
- a permanent magnet disposed around the anode via an insulator;
- a cathode ring disposed around the permanent magnet;
- a first cathode and a second cathode disposed at places above and below the anode and connected to the cathode ring;
- and
- an acceleration electrode disposed in a manner to cover the first cathode, the second cathode and the cathode ring and operative to accelerate generated ions for radiating the ions to the outside of the ion gun, and
- the beam forming electrode is disposed between the acceleration electrode and the second cathode disposed on the side of the acceleration electrode.
11 more elements
Dependencies are inferred from the claim text.