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US 11,256,170 B2Granted
Compound, resist composition, and method for forming resist pattern using it
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsTakumi Toida, Masatoshi Echigo, Takashi Sato, Youko Shimizu
Life of this patent
Estimating the term…
Abstract
The resist composition of the present invention contains one or more selected from compounds represented by specific formulae and resins obtained using these as monomers.
Claims20
A resist composition comprising one or more selected from a compound represented by the following general formula (1), a compound represented by the following general formula (2), and a resin obtained using these as monomers:
- wherein R1 is a 2n-valent group of 1 to 30 carbon atoms;
- each R2 is independently a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, an alkenyl group of 2 to 10 carbon atoms, a hydroxy group, or a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and may be the same or different on the same naphthalene ring or benzene ring;
- n is an integer of 1 to 4, and when n is an integer of 2 or greater in the general formulae (1) and (2), structural formulae of n repeating units may be the same or different;
- in the general formula (1), each m1 is independently an integer of 0 to 7, provided that at least one m1 is an integer of 1 to 7;
- in the general formula (2), each X is independently an oxygen atom or a sulfur atom, and each is independently an integer of 0 to 6, provided that at least one m2 is an integer of 1 to 6;
- and in the general formulae (1) and (2), each q is independently 0 or 1;
- provided that in the general formulae (1) and (2), at least one R2 is a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and R1 is a group comprising an iodine atom,
- wherein the composition further comprises a solvent, an acid generating agent, and an acid diffusion controlling agent.
5 more elements
A compound represented by the following general formula (1):
- wherein R1 is a 2n-valent group of 1 to 30 carbon atoms;
- each R2 is independently a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, or an alkenyl group of 2 to 10 carbon atoms, a hydroxy group, or a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and may be the same or different on the same naphthalene ring or benzene ring;
- n is an integer of 1 to 4, and when n is an integer of 2 or greater, structural formulae of n repeating units may be the same or different;
- each m1 is independently an integer of 0 to 7, provided that at least one m1 is an integer of 1 to 7;
- and each q is independently 0 or 1;
- provided that in the general formula (1), at least one R2 is a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and R1 is a group comprising an iodine atom.
3 more elements
A compound represented by the following general formula (2):
- wherein R1 is a 2n-valent group of 1 to 30 carbon atoms;
- each R2 is independently a halogen atom, a linear, branched, or cyclic alkyl group of 1 to 10 carbon atoms, an aryl group of 6 to 10 carbon atoms, or an alkenyl group of 2 to 10 carbon atoms, a hydroxy group, or a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and may be the same or different on the same naphthalene ring or benzene ring;
- n is an integer of 1 to 4, and when n is an integer of 2 or greater, structural formulae of n repeating units may be the same or different;
- each X is independently an oxygen atom or a sulfur atom;
- each m2 is independently an integer of 0 to 6, provided that at least one m2 is an integer of 1 to 6;
- and each q is independently 0 or 1;
- provided that in the general formula (2), at least one R2 is a group obtained by replacing a hydrogen atom of a hydroxy group with an acid dissociation group, and R1 is a group comprising an iodine atom.
4 more elements
Dependencies are inferred from the claim text.