Current measurement apparatus including charge/discharge means and current measurement method using same

A measurement module, which is connected to one end of a capacitor connected to a signal terminal of a device under test (DUT) to measure a value of a current related to an inspection of the DUT, which is a subject for current measurement, in a state in which the signal terminal of the DUT is connected in parallel to the capacitor and the DUT operates due to a test pattern, the measurement module comprising:

• an input/output (I/O) buffer configured to increase or decrease an amount of charges of the capacitor through charging or discharging the capacitor and output a signal corresponding to an output logic value according to a voltage of one end of the capacitor;
• a time measurer configured to measure an arrival time which is a time during which the voltage of one end of the capacitor reaches a predetermined second voltage from a predetermined first voltage;
• and
• a controller configured to control the I/O buffer and the time measurer to measure the arrival time and measure the value of the current related to the inspection of the DUT using the arrival time.

A method of measuring a value of a current related to an inspection of a device under test (DUT), which is a subject for the current measurement, using a current measurement apparatus, the method comprising:

• (a) in a state in which a signal terminal of the DUT is connected in parallel to a capacitor, a switching element is connected in series between one end of the capacitor and the signal terminal of the DUT, and the switching element is opened, (i) generating, by the current measurement apparatus, a test pattern to operate the DUT in a standby state or an active state or assisting a test pattern generation apparatus interlocked with the current measurement apparatus to operate and (ii) increasing or decreasing, by the current measurement apparatus, the amount of charges of the capacitor through charging or discharging the capacitor such that a voltage of one end of the capacitor reaches a predetermined first voltage;
• (b) when the voltage of one end of the capacitor reaches the first voltage, closing, by the current measurement apparatus, the switching element such that a variation in amount of charges of the capacitor begins;
• (c) when it is detected that the voltage of one end of the capacitor is varied to a predetermined second voltage, obtaining, by the current measurement apparatus, an arrival time which is a time elapsed from when the switching element is closed to when the variation reaches to the predetermined second voltage;
• and
• (d) measuring, by the current measurement apparatus, the value of the current related to the inspection of the DUT using the arrival time.