MeV-based ion beam analysis apparatus

A device for an MeV-based ion beam analysis of a sample, comprising:

• a vacuum measurement chamber, the vacuum measurement chamber including:
• a detector, and
• a sample observation system having a telecentric camera and a deflection mirror;
• a vacuum system configured to generate a vacuum within the vacuum measurement chamber;
• an ion beam tube configured to transmit an ion beam;
• a focusing system configured to focus the ion beam transmitted via the ion beam tube;
• a sample transfer system, the sample transfer system including a sample manipulator having a sample holder configured to receive at least one sample;
• and
• an in-coupling system configured to connect the ion beam tube to the vacuum measurement chamber in a vacuum-tight manner, the in-coupling system including:
• an ion beam vacuum feedthrough,
• a receiver configured to receive the detector,
• a receiver configured to receive the sample observation unit, and
• a receiver configured to receive the sample transfer system,
• wherein the in-coupling system provides a direct mechanical connection between the focusing system configured to focus the ion beam, the detector, and the sample observation unit.

A device for an MeV-based ion beam analysis of a sample, comprising:

• a vacuum measurement chamber, the vacuum measurement chamber including:
• a detector, and
• a sample observation system;
• a vacuum system configured to generate a vacuum within the vacuum measurement chamber;
• an ion beam tube configured to transmit an ion beam;
• a focusing system configured to focus the ion beam transmitted via the ion beam tube;
• a sample transfer system, the sample transfer system including a sample manipulator having a sample holder configured to receive at least one sample;
• and
• an in-coupling system configured to connect the ion beam tube to the vacuum measurement chamber in a vacuum-tight manner, the in-coupling system including:
• an ion beam vacuum feedthrough,
• a receiver configured to receive the detector,
• a receiver configured to receive the sample observation unit, and
• a receiver configured to receive the sample transfer system,
• wherein the in-coupling system provides a direct mechanical connection between the focusing system configured to focus the ion beam, the detector, and the sample observation unit, and
• wherein the vacuum measurement chamber is arranged in an alignable manner in translation and rotation with respect to the ion beam using a plurality of stages of increasingly finer adjustment screws and laser reflection.