Light irradiation device and flash lamp
AssigneeUshio Denki Kabushiki Kaisha
InventorsKazuyuki Mori, Masahiko Kase
Life of this patent
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Abstract
To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted. A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.
Claims21
A light irradiation device comprising a plurality of flash lamps, each including a long light-emitting tube enclosed with light-emitting gas, a first electrode introducing part provided on one end side of the light-emitting tube, a second electrode introducing part provided on the other end side, and a first electrode and a second electrode provided in each electrode introducing part;
- wherein a light emission surface is provided at a distal end on the second electrode introducing part side of the light-emitting tube of the flash lamp, and the large number of flash lamps are adjacently provided in a standing manner on a top plate of the processing chamber so that the light emission surface faces an inside of the processing chamber;
- at least the second electrode introducing part of the flash lamp is disposed so as to intersect a longitudinal axis of the light-emitting tube;
- and
- the light-emitting tubes of the adjacent flash lamps are arranged such that the longitudinal axes are inclined with respect to each other so that the interval on the first electrode introducing part side becomes wider than the interval on the light emission surface side.
A flash lamp comprising a long cylindrical light-emitting tube enclosed with light-emitting gas, a first electrode introducing part consisting of a tube connected to one end side of the light-emitting tube, a second electrode introducing part consisting of a tube connected to the other end side, and a first electrode and a second electrode provided in each electrode introducing part;
- wherein a light emission surface is provided at a distal end on the second electrode introducing part side of the light-emitting tube of the flash lamp;
- at least the second electrode introducing part is arranged to intersect a longitudinal axis of the light-emitting tube;
- and
- a tip of the second electrode is arranged to protrude further inward than an inner wall of the cylindrical light-emitting tube.
A light irradiation unit comprising a plurality of flash lamps, each including a long light-emitting tube enclosed with light-emitting gas, a first electrode introducing part provided on one end side of the light-emitting tube, a second electrode introducing part provided on the other end side, and a first electrode and a second electrode provided in each electrode introducing part;
- wherein a light emission surface is provided at a distal end on the other end side of the light-emitting tube of the flash lamp;
- and
- the light-emitting tubes of the adjacent flash lamps are arranged such that the longitudinal axes are inclined with respect to each other so that the interval on the first electrode introducing part side becomes wider than the interval on the light emission surface side.
Dependencies are inferred from the claim text.