Rare earth thin film magnet, process for producing same, and target for forming rare earth thin film magnet
AssigneeJX Nippon Mining & Metals Corporation
InventorsMasaki Nakano, Hirotoshi Fukunaga, Takeshi Yanai, Masaru Itakura, Hironobu Sawatari
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Abstract
The present invention provides a rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture in which an α-Fe phase and a Nd2Fe14B phase are alternately arranged three-dimensionally, and each phase has an average crystal grain size of 10 to 30 nm. An object of this invention is to provide a rare earth thin film magnet having superior mass productivity and reproducibility and favorable magnetic properties, as well as to provide the production method thereof and a target for producing the thin film.
Claims5
A rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture consisting of an α-Fe phase and a Nd2Fe14B phase which are alternately arranged three-dimensionally in the texture, wherein each of the α-Fe phase and the Nd2Fe14B phase has an average crystal grain size of 10 to 30 nm, and wherein the rare earth thin film magnet has a thickness of 5 μm or more, a maximum energy product (BH)max of 90 kJ/m3 or more and 130 kJ/m3 or less, a residual magnetization of 0.99 T or more and 1.05 T or less, and a coercivity of 386 kA/m or more and 446 kA/m or less.
Dependencies are inferred from the claim text.