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US 11,249,105 B2Granted
Surface acoustic wave (SAW)-based inertial sensor, methods, and applications
AssigneeCornell University
InventorsAmit Lal, Serhan Mehmet Ardanuc
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Abstract
A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 μg and 0.01°/hr, representing a dynamic range of 10 orders of magnitude.
Claims8
A SAW-based inertial sensor, comprising:
- a piezoelectric substrate;
- a SAW drive resonator comprising a first pair of interdigitated transducers (IDTs) and a second pair of IDTs disposed on the substrate, adapted to generate a primary SAW wave that propagates between the first pair of IDTs;
- an array of pillars disposed in a center region of the SAW drive resonator, wherein the pillars are configured to be resonant in a longitudinal resonant mode at a frequency of the primary SAW wave;
- a SAW-sensing IDT;
- a graphene SAW-detection electrode disposed adjacent an inner region of the SAW-sensing IDT;
- and
- a multi-ferroic strain-induced magnetic (B) field transducer disposed in a path of a secondary SAW propagating in a transverse direction to the primary SAW wave.
4 more elements
Dependencies are inferred from the claim text.