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US 11,248,976 B2Granted
Capacitive pressure sensors and other devices having a suspended membrane and having rounded corners at an anchor edge
AssigneeSciosense B.V.
InventorsWillem Frederik Adrianus Besling, Casper Van Der Avoort, Remco Henricus Wilhelmus Pijnenburg, Olaf Wunnicke, Jörg Siegert, Alessandro Faes
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Abstract
Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.
Claims24
A semiconductor device comprising:
- a first electrode;
- a cavity over the first electrode;
- and
- a second electrode comprising:
- a suspended membrane over the cavity;
- and
- electrically conductive anchor trenches laterally surrounding the cavity,
- wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.
5 more elements
A semiconductor device comprising:
- an integrated circuit;
- and
- a capacitive pressure sensor disposed over and electrically connected to the integrated circuit, the capacitive pressure sensor comprising:
- a first electrode;
- a cavity over the first electrode;
- and
- a second electrode comprising:
- a suspended membrane over the cavity;
- and
- electrically conductive anchor trenches laterally surrounding the cavity,
- wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.
8 more elements
Dependencies are inferred from the claim text.