Method for teaching a transportation position and alignment jig
AssigneeASM IP Holding B.V.
InventorsHideki Yoshida, Masaei Suwada
Life of this patent
Estimating the term…
Abstract
Examples of a method for teaching a transportation position includes correcting the position of an alignment jig having a plurality of sloping surfaces relative to a susceptor pin projecting upwards from an upper surface of a susceptor by lowering a robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surfaces by virtue of an own weight of the aliment jig, detecting a position of the alignment jig before and after the positional correction of the alignment jig, and correcting a movement destination information by an amount corresponding to a difference between an initial position and a corrected position of the alignment jig.
Claims11
A method for teaching a transportation position comprising:
- detecting a position of an alignment jig having sloping surfaces on a bottom surface as an initial position of the alignment jig by a sensor while the alignment jig is being moved from a home position to a susceptor by a robot hand based on predetermined movement destination information;
- positioning the alignment jig on the susceptor by the robot hand;
- correcting the position of the alignment jig relative to a susceptor pin projecting upwards from an upper surface of the susceptor by lowering the robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surface by virtue of an own weight of the aliment jig;
- raising the robot hand in order for the robot hand to support the alignment jig which is supported by the susceptor pin;
- detecting a corrected position of the alignment jig by the sensor while the alignment jig is being returned to the home position by the robot hand;
- and
- correcting the movement destination information by an amount corresponding to a difference between the initial position and the corrected position.
Dependencies are inferred from the claim text.