Appearance inspection system, setting device, image processing device, inspection method, and program

A setting method in an appearance inspection system that performs appearance inspection by imaging a target using an imaging device while causing a relative position between the target and the imaging device to be different, the setting method comprising:

• deciding one imaging condition candidate or a plurality of imaging condition candidates including the relative position between the target and the imaging device in the inspection for each of a plurality of inspection target positions on the target,
• wherein, in the deciding of the one imaging condition candidate or the plurality of imaging condition candidates, a plurality of imaging condition candidates are decided for at least one inspection target position among the plurality of inspection target positions,
• wherein the setting method further comprises deciding a change route of the imaging condition for sequentially imaging the plurality of inspection target positions by selecting the one imaging condition candidate or one of the plurality of imaging condition candidates decided for each of the plurality of inspection target positions as an imaging condition so that a pre-decided requirement is satisfied,
• wherein the setting method further comprises calculating an evaluation value of each of a plurality of combination patterns in which at least one of an imaging order of the plurality of inspection target positions and the imaging condition decided for the plurality of inspection target positions is mutually different and deciding the change route based on the evaluation value,
• each of the plurality of combination patterns is a pattern in which a plurality of imaging conditions selected one by one from the plurality of imaging condition candidates decided for each of the plurality of inspection target positions are arranged in the imaging order of the plurality of inspection target positions, and
• the combination patterns are virtual patterns that are not formed on the target, and
• the combination patterns are virtual traveling paths designed for the imaging device, the change route is selected from one of the combination patterns based on the evaluation value, and the imaging device moves according to the selected combination pattern.

A non-transitory computer readable medium having a program stored thereon, the program supporting an appearance inspection system that performs appearance inspection by imaging a target using an imaging device while causing a relative position between the target and the imaging device to be different, the program causing a computer to perform:

• deciding one imaging condition candidate or a plurality of imaging condition candidates including the relative position between the target and the imaging device in the inspection for each of a plurality of inspection target positions on the target,
• wherein, in the deciding of the one imaging condition candidate or the plurality of imaging condition candidates, a plurality of imaging condition candidates are decided for at least one inspection target position among the plurality of inspection target positions,
• wherein the setting program causes the computer to further perform deciding a change route of the imaging condition for sequentially imaging the plurality of inspection target positions by selecting the one imaging condition candidate or one of the plurality of imaging condition candidates decided for each of the plurality of inspection target positions as an imaging condition so that a pre-decided requirement is satisfied,
• wherein the setting program causes the computer to further perform calculating an evaluation value of each of a plurality of combination patterns in which at least one of an imaging order of the plurality of inspection target positions and the imaging condition decided for the plurality of inspection target positions is mutually different and deciding the change route based on the evaluation value,
• each of the plurality of combination patterns is a pattern in which a plurality of imaging conditions selected one by one from the plurality of imaging condition candidates decided for each of the plurality of inspection target positions are arranged in the imaging order of the plurality of inspection target positions, and
• the combination patterns are virtual patterns that are not formed on the target, and
• the combination patterns are virtual traveling paths designed for the imaging device, the change route is selected from one of the combination patterns based on the evaluation value, and the imaging device moves according to the selected combination pattern.