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US 11,243,096 B2Granted
Encoder apparatus, drive apparatus, stage apparatus, and robot apparatus
AssigneeNikon Corporation
InventorMasahiko Goto
Life of this patent
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Abstract
Provided is an encoder apparatus capable of reducing frequency of maintenance of a battery. An encoder apparatus includes: a position detection system including a detector that detects position information on a mover; an electric signal generator that generates an electric signal in response to movement of the mover; and a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the electric signal generator.
Claims21
An encoder apparatus, comprising:
- a position detection system including a detector that detects position information on a mover;
- an electric signal generator having a Wiegand wire that generates an electric signal in response to movement of the mover;
- and
- a battery that supplies at least a part of power consumed by the position detection system in accordance with the electric signal generated by the Wiegand wire of the electric signal generator, wherein
- the battery includes a primary cell and a secondary cell,
- the secondary cell is charged, at least in part, by power from the electric signal generated by the Wiegand wire of the electric signal generator, and
- the encoder apparatus includes a selector that selects which of the primary cell and the secondary cell is used to supply power to the position detection system.
4 more elements
Dependencies are inferred from the claim text.