Reactor and production method of trichlorosilane
AssigneeTokuyama Corporation
InventorsKenji Hirota, Katsuya Ogihara
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Abstract
An object of the present invention is to prevent stress-corrosion cracking of a header (40) of a reactor. A reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other includes a cooler (70), the cooler including a plurality of heat transfer medium pipes (30) and a header (40), the plurality of heat transfer medium pipes being provided in a fluid bed (60) inside the reactor, the header being provided in a freeboard section (50) inside the reactor, the header being comprised of a corrosion-resistant material.
Claims4
A reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other, comprising a cooler,
- the cooler including a plurality of heat transfer medium pipes and a header connected to the plurality of heat transfer medium pipes,
- the plurality of heat transfer medium pipes being provided in a fluid bed inside the reactor,
- the header being provided in a freeboard section inside the reactor,
- the header being comprised of a corrosion-resistant material, the corrosion-resistant material being Hastelloy C276, Hastelloy C22, or Inconel 600.
Dependencies are inferred from the claim text.