Laser device and line narrow optics
AssigneeGigaphoton Inc.
InventorHirotaka Miyamoto
Life of this patent
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Abstract
A laser device may include a chamber accommodating a pair of discharge electrodes, a grating provided outside the chamber, first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber at least in a first direction perpendicular to a direction of discharge between the pair of discharge electrodes, and second beam-expanding optics having a plurality of prisms provided between the chamber and the grating, the second beam-expanding optics being configured to expand a beam width of light outputted from the chamber at least in a second direction parallel to the direction of discharge between the pair of discharge electrodes.
Claims6
A laser device comprising:
- a chamber accommodating a pair of discharge electrodes;
- a grating provided outside the chamber;
- a first beam-expanding optics provided between the chamber and the grating and configured to expand a beam width of light outputted from the chamber in a first direction perpendicular to a travelling direction of the light;
- a second beam-expanding optics having a plurality of optical elements provided between the chamber and the first beam-expanding optics, the second beam-expanding optics being configured to expand a beam width of the light outputted from the chamber in a second direction perpendicular to both the travelling direction of the light and the first direction, the optical elements being supported as a single unit by a supporting unit such that the optical elements are capable of, in conjunction with each other, being attached to and detached from the chamber, the grating, and the first beam-expanding optics;
- and
- a housing member accommodating the first beam-expanding optics, wherein nitrogen gas is introduced to the housing member as a purge gas.
Dependencies are inferred from the claim text.