Photonic integrated circuit comprising a dielectric waveguide on a substrate including a local functionalization to enable metallization-free THz wave propagation
AssigneeTechnische Universität Darmstadt
InventorSascha Preu
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Abstract
A photonic integrated circuit is disclosed comprising: a dielectric substrate (110); a dielectric waveguide arrangement (120) on the substrate (110) for guiding terahertz (THz) waves; and a local functionalization (130) having a metallization in a surface area of the dielectric waveguide arrangement (120). The metallization is localized along a propagation direction of the THz waves to allow a metallization-free propagation of the THz wave outside of the local functionalization.
Claims8
A photonic integrated circuit, comprising:
- a dielectric substrate;
- a dielectric waveguide arrangement on the substrate for guiding terahertz waves;
- a local functionalization which includes a metallization in a surface area of the dielectric waveguide arrangement, wherein the metallization is localized along a propagation direction of the THz waves to enable metallization-free propagation of the THz wave outside of the local functionalization;
- and
- a further dielectric substrate, wherein the dielectric waveguide arrangement is arranged between the dielectric substrate and the further dielectric substrate, and wherein a refraction index of the further dielectric substrate is at least a factor of 1.5 lower than a refraction index of the dielectric waveguide arrangement.
A method for manufacturing a photonic integrated circuit, comprising:
- providing a dielectric substrate;
- forming a dielectric waveguide arrangement on the substrate for guiding THz waves;
- and
- functionalizing a locally restricted surface area of the dielectric waveguide arrangement by forming a metallization on the local surface area;
- wherein forming the dielectric waveguide arrangement (120) and forming the metallization (130) comprises one of lithographic structuring, etching, gluing of dielectric layers, and evaporating metals.
A photonic integrated circuit, comprising:
- a dielectric substrate;
- a dielectric waveguide arrangement on the substrate for guiding terahertz (THz) waves;
- a local functionalization which includes a metallization in a surface area of the dielectric waveguide arrangement, wherein the metallization is localized along a propagation direction of the THz waves to enable metallization-free propagation of the THz wave outside of the local functionalization;
- and
- a diode for generating a THz oscillation,
- wherein the dielectric waveguide arrangement forms a Vivaldi antenna which couples to the diode and, starting from the diode, includes a widening opening portion for radiation of the THz wave,
- and wherein the metallization is formed on both sides of the widening opening portion to support coupling of the THz oscillation from the diode into the Vivaldi antenna.
Dependencies are inferred from the claim text.