Frequency adjustment method of vibrator element
AssigneeSeiko Epson Corporation
InventorsKeiichi Yamaguchi, Seiichiro Ogura, Masahiro Oshio, Ryuta Nishizawa
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AssigneeSeiko Epson Corporation
InventorsKeiichi Yamaguchi, Seiichiro Ogura, Masahiro Oshio, Ryuta Nishizawa
Estimating the term…
A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.
A frequency adjustment method of a vibrator element, the method comprising:
Dependencies are inferred from the claim text.